AFM & SEM Calibration and Testing Specimens

Atomic Force Microscopy & Scanning Probe Microscopy Calibration

1. AFM Gold Calibration Kit
2. TipChecker for AFM Probes
3. HS-Series AFM Calibration Standards & CS-XYZ AFM Calibration
4. Highly Oriented Pyrolytic Graphite (HOPG)
5. High Resolution Calibration Standards for AFM, SEM, Auger, 145 & 292nm pitch
6. Very High Resolution Calibration Standard for AFM, STM, Auger, FIB, & SEM with 150nm & 300nm pitch
7. 2000 lines/mm Cross Line Grating Replica
8. PELCO® AFM Tip & Resolution Test Specimen
9. Critical Dimension (CD) Calibration Test Specimens for SEM, FIB and AFM
10. Multiple Use Microscopy Calibration and AFM Profilometry MRS-3
11. Multiple Use Microscopy Calibration and AFM Profilometry MRS-4
12. Multiple Use Microscopy Calibration and AFM Profilometry MRS-6
11. AFM Test Gratings
12. KPFM-EFM Standard
13. Online Magnification Calibration Calculators

Scanning Electron Microscopy Calibration

1. Pelcotec™ CDMS Critical Dimension Magnification Standards
2. Pelcotec™ G-1 Silicon Calibration Specimen 1µm Pitch
3. Pelcotec™ LMS-20 Low Magnification Calibration Standard
4. MRS-6 Magnification Reference Standard 1,500X to 1,000,000X
5. Critical Dimension (CD) Calibration Test Specimen for SEM/FIB/AFM
6. 2D Holographic Array Very High Resolution Calibration Standards for SEM, FIB, AFM and Auger
7. Low Magnification Calibration Ruler
8. MRS-4 Magnification Reference Standard 10X to 200,000X
9. Planotec 10µm Pitch Silicon Calibration Specimen
10. 145 & 292nm Pitch High Magnification Calibration Standard for SEM, FIB, AFM, Auger
11. 500nm Cross Line Grating Replica
12. MRS-3 Magnification Reference Standard 10X to 50,000X
13. Fine Copper Mesh Grid Low Magnification Standard

Scanning Electron Microscopy Test and Resolution Specimens

1. AuSome™ Resolution Test Specimen for SEM, FIB & FESEM
2. Gold on Carbon High Resolution Test Specimens
3. Tin on Carbon Resolution Test Specimens
4. Low & Medium Magnification Resolution Test Specimens
5. Astigmatism Correction and Resolution Determination
6. Gold Spheres on Vitreous Carbon Test Specimen
7. Back Scattered Electron Test Specimens

Forensic - GSR

Planotec GSR & Particle Analysis Calibration Kit

Calibration Guides

1. Magnification Calibration Calculator, 2160 lines/mm
2. Magnification Calibration Calculator, 2000 lines/mm
3. Ultrastructure Size Calculator


Test Structures

1.  PA Series
2.  HOPG
3. TGX Series
4. TGXYZ Series
5. TGF11 Series

 

Calibration Standards

1. XYZ Calibration Nanogrid
2. Height Calibration Standards
3. TipCheck for AFM Tip Evaluation
4. KPFM & EFM Sample