KPFM-EFM Standard

Close-up of KPFM-EFM
Probe Standard

A test and calibration standard for Electrostatic Force and Kelvin Probe atomic force microscopy modes. Sample consists of arrays of Aluminum and Gold lines deposited on oxide-covered silicon. Thin copper wires are connedted to the Al and Au contact pads, allowing a specified electric field to be applied between the lines.

1. Line arrays with 8, 20, and 40um pitch
2. Line height of ~35nm
3. Mounted verson is on 15mm glass on a standard 15mm AFM disc with thin copper wires connected to the Al and Au bond pads on each side of the die
4. Unmounted version is die only, no substrate or wires

KPFM-EFM Probe Standard, mounted
on 15mm mount with wires (#629-AFM)