TGXYZ Series
TGXYZ Series
SEM image of a TGXYZ grating
Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular SiO2 steps on a Si wafer. The small square in the center with dimensions 500µm by 500µm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5µm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10µm.
The step height value is calibrated over the whole active area. The actual step height, indicated on the individual unit label, may differ slightly from the nominal value.
| Order Code |
Step Height |
Step Height Accuracy |
Array Pitch |
Pitch Accuracy |
Active Area |
Chip Dimensions |
| TGXYZ01 | 20nm | 5% of measured value | 5 & 10µm | 0.1µm | 1×1mm | 5×5×0.3mm* |
| TGXYZ02 | 100nm | 3% of measured value | 5 & 10µm | 0.1µm | 1×1mm | 5×5×0.3mm* |
| TGXYZ03 | 500nm | 3% of measured value | 5 & 10µm | 0.1µm | 1×1mm | 5×5×0.3mm* |
*dimensions of silicon chip without the metal base plate
Application
The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. One can compensate for vertical non-linearity by using several calibration gratings with different nominal step heights.
For accurate quantification of images of calibration gratings from the TGXYZ series, one can use the calibration option in the Scanning Probe Image Processor (SPIP) designed by Image Metrology.
TGXYZ01
AFM XYZ calibration grating, 20nm step height, 5µm and 10µm pitch arrays
The TGXYZ01 is an AFM calibration standard of the TGXYZ series that features:
• 500×500µm square with 5µm pitch arrays pf circular pillars and holes, as well as lines in the X and Y direction
• 1×1mm square with 10µm pitch arrays of square pillars and square holes
• step height in the range of 20nm
MikroMasch offers versions of the same calibration standard with 100nm step height (TGXYZ02) and 500nm step height (TGXYZ03).
For more detailed information on the TGXYZ series AFM calibration standards please check the TGXYZ General Description (above).
TGXYZ02
AFM XYZ calibration grating, 100nm step height, 5µm and 10µm pitch arrays
The TGXYZ02 is an AFM calibration standard of the TGXYZ series that features:
• 500×500µm square with 5µm pitch arrays pf circular pillars and holes, as well as lines in the X and Y direction
• 1×1mm square with 10µm pitch arrays of square pillars and square holes
• step height in the range of 100nm
MikroMasch offers versions of the same calibration standard with 20nm step height (TGXYZ01) and 500nm step height (TGXYZ03).
For more detailed information on the TGXYZ series AFM calibration standards please check the TGXYZ General Description (above).
TGXYZ03
AFM XYZ calibration grating, 500nm step height, 5µm and 10µm pitch arrays
The TGXYZ03 is an AFM calibration standard of the TGXYZ series that features:
• 500×500µm square with 5µm pitch arrays pf circular pillars and holes, as well as lines in the X and Y direction
• 1×1mm square with 10µm pitch arrays of square pillars and square holes
• step height in the range of 500nm
MikroMasch offers versions of the same calibration standard with 20nm step height (TGXYZ01) and 100nm step height (TGXYZ02).
For more detailed information on the TGXYZ series AFM calibration standards please check the TGXYZ General Description (above).
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Documentation
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