High Resolution Calibration Standards for AFM, SEM, Auger, 145 & 292nm pitch

Holographic Grating for Scanning Electron Microscopy, Atomic Force Microscopy, Auger and Focused Ion Beam

Precision, holographic patterns, provide accurate calibration and feature high stability and usability. Moderate ridge heights are convenient for AFM. Specimens provide good contrast for secondary and backscatter imaging with SEM. They enable accurate calibration for high resolution, nanometer-scale measurements. Available with 145 and 292nm pitch.

145nm pitch

292nm pitch

145nm Pitch Calibration Standard for AFM

Precision holographic pattern for accurate calibration for high resolution, nanometer scale measurements.

Period: 145nm pitch nominal, one dimensional array. Accuracy is +/- 1nm. Calibration certificate will give the actual pitch of the standard.
Surface structure: Aluminum lines on glass, 4x6mm dimensions. Line height (about 100nm) and line width (about 75nm) are not calibrated.
Usability: The calibrated pattern covers the entire standard. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 250nm to 10um. Available unmounted or mounted on a 12mm steel AFM disk.
Certification: Comes with a non-traceable manufacturer's certificate stating average pitch, based on batch measurements.

Sample Certificate for 145nm Pitch Calibration Standard

292nm Pitch High Magnification, High Resolution
Calibration Standard for AFM, SEM, Auger and FIB.

Precision holographic grating standard with high contrast and excellent edge definition.

Period: 292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure: Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer's certificate stating average pitch, based on batch measurements; See Sample Certificate, Non-Traceable
There is also the traceable, certified version measured in comparison with a standard calibrated at PTB (Physiklisch-Technischen Bundesanstalt in Braunschweig, Germany, is the German counterpart of NIST). The standard is NIST traceable by virtue of the mutual recognition agreement by NIST and PTB.

See Mount Selections A-R