HS-Series AFM Calibration Standards & CS-XYZ AFM Calibration

HS-Series AFM Calibration Standards

Diagrams showing construction and patterns.

Step heights of 20, 100 or 500nm.

The HS-series calibration standards offers an easy and reliable way to calibrate AFM systems. Primarily designed for accurate Z-axis calibration the standards also offer X- and Y-axis calibration for bigger scanners in the 40-100um range. The structure symmetry enables calibration without the need to rotate and re-align the sample in between x- and Y-axis calibration.
The HS-series feature silicon dioxide structure arrays on a 5x5mm silicon chip. The fabrication process ensures excellent uniformity of the structures across the chip. There are three step heights available with nominal values of: 20nm, 100nm, and 500nm. The actual value will be supplied with the delivered calibration standard. Arrays of structures with different shape and pitch are integrated on the chip. The larger square of 1 x 1mm contains square pillars and holes with a 10um pitch. The smaller center square of 500 x 500µm contains circular pillars and holes as well as lines in both X- and Y-direction with a 5um pitch.

HS-500MG - 3% height accuracy of the value that is handwritten on the label of the individual box.

HS-20MG - 2% height accuracy; 100 nanometer pitch (lateral) accuracy for all arrays

HS-100MG - 3% height accuracy; 100 nanometer pitch accuracy for all arrays

HS-500MG - 3% height accuracy; 100 nanometer pitch accuracy for all arrays

CS-20NG - 2% height accuracy; 100 nanometer pitch accuracy for the 5 micrometer and 10 micrometer pitch arrays, and 10 nanometer pitch accuracy for the 500 nanometer pitch array

The silicon chips are available unmounted or mounted on a 12mm standard AFM disc using a high quality electrically conductive epoxy.

CS AFM XYZ Calibration Standard

The CS-20NG represents an advanced XYZ calibration grid that enables reliable calibration of AFM systems down to the nanometer level. The XYZ calibration standard features silicon dioxide structures on a 5 x 5mm silicon chip. The calibration area is in the middle of the chip and can be easily located by the optical system of the AFM. The structure step height is in the range of 20nm. The actual height value will be supplied with the delivered calibration standard. CS-20NG has three different x-y array sizes, all with the same 20nm height. The large 1 x 1mm square contains square pillars and holes with a 10µm pitch. The middle square contains circular pillars, holes and lines with a 5µm pitch. The small central area contains circular holes with a 500nm pitch. The CS-20NG is suitable for both lateral and vertical AFM scanner calibration. The structure symmetry enables calibration in one step without the need to rotate the sample between X- and Y-calibration.

Vertical accuracy is 2% of the actual value which corresponds to ±0.4nm. The lateral pitch accuracy for the 5µm and 10µm patterns is 0.1µm. For the 500nm pitch region, the lateral accuracy is 10nm.

The XYZ calibration standard comes unmounted or, optionally, mounted on any of our common AFM or SEM specimen mounts.

Mounts A-R