Sputter Coater 108auto/SE

84115
Sputter coater 108auto/SE with
thickness controller MTM-20

Cressington 108 Sputter Coaters are ideal for routine sample preparation. Compact, economical and simple to operate, they offer rapid pumpdown times, fine-grain coatings and negligible sample heating. Cool, fine-grain sputtering is achieved with a very efficient dc magnetron head. A quick-change target method allows a range of metals to be used. The variable, safety-interlocked sputtering supply is not influenced by vacuum level.

The Cressington 108auto/SE has the same specification as the 108auto except for the larger chamber size of 150mm Ø (5.9") x 165mm (6.5").

In automatic mode the coater can be controlled in two ways. The digital timer can be used to give repeatable coatings or the (optional) MTM-20 controller can be used to terminate the sputtering process at the desired thickness.

The 108auto/SE is intended for use in applications where coating thickness must have a very high degree of uniformity. The unique Rotary-Planetary-Tilt stage, originally developed for the 208hr high resolution coater, can be used on the 108auto/SE.

The sputter current and argon gas pressure are set independently for the desired coating conditions.

Pumping System

The modular desktop design combines sputter control unit, pumping system and thickness monitor into an area of approximately 16" x 24" (42cm x 60cm). The desktop pumping system is connected with a metal coupling system. The compact high speed rotary pump is mounted on an anti-vibration table with a desktop base.

The pumping system can be easily extended into a dual pumping system to accommodate the Cressington Sputter Coater along side a Cressington Carbon Coater.

SPECIFICATION

Automatic sputter coater

Chamber size	150mm Ø (5.9") Variable height, 165mm - 250mm (6.5" - 9.8")
Sputter head	Low voltage planar magnetron Quick target change Wrap-around dark-space shield Target shutter
Sputter target	Gold, Gold/Palladium or Platinum targets on order 57mm Ø x 0.1mm thick
Sputter supply	Microprocessor based Safety interlocked Current control independent of vacuum Digitally selectable current (10, 20, 30 or 40mA)
Sample table	Holds 12 SEM ½" stubs Height adjustment through 60mm
Analogue metering	Vacuum, Atm - 0.001mb Current, 0 - 50mA
Control method	Automatic operation of gas purge and leak functions Automatic process sequencing Full manual override Digital timer, 5 - 300 seconds with pause Automatic vent
Thickness monitoring	Optional, MTM-10
Thickness control	Optional, MTM-20 with termination facility
Dimensions	Width 420mm (16.5"), Depth 295mm (11.6"), Height 332mm (13.1")
Weight	13Kg (28.7 lbs)
Power	45 VA max (excluding rotary pump)

Pumping system

Rotary Pump	High speed, direct drive 2-stage
Pumping speed	2.5 m³/hr (50/60Hz) Pumpdown time to 0.1mb is 20/25 sec.
Desktop system	Vacuum pump is mounted on desktop compatible anti-vibration table All metal vacuum coupling system
Dimensions	Width 330mm (13.0"), Depth 215mm (8.5"), Height 210mm (8.3"), 270mm (10.6") with filter
Weight	15Kg (33.2 lbs)
Power	130 VA

Services required

Supply	100 - 120 or 200 - 240 VAC, 50/60Hz (specify on order)
Power	170 VA max
Argon gas	Purity, min. 99.9% Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar) Hose connection, 6.0mm (¼")

Documentation

SDS

Technical Notes

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Variant	Variant total	Quantity	Price	Variant total
Automatic Sputter Coater “108auto/SE” without target, pumping system and deposition thickness measuring system. PLEASE ASK FOR THE OFFER (Unit: each)84115	Automatic Sputter Coater “108auto/SE” without target, pumping system and deposition thickness measuring system. PLEASE ASK FOR THE OFFER (Unit: each)84115 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

Pumping System (2.5m3/hr). Oil vacuum pump for Cressington coaters on anti-vibrations try. PLEASE ASK FOR THE OFFER (Unit: each)80115	Pumping System (2.5m3/hr). Oil vacuum pump for Cressington coaters on anti-vibrations try. PLEASE ASK FOR THE OFFER (Unit: each)80115 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

MTM-10 Thickness Monitor System. PLEASE ASK FOR HE OFFER (Unit: each)80225	MTM-10 Thickness Monitor System. PLEASE ASK FOR HE OFFER (Unit: each)80225 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

MTM-10 Thickness Monitor System for R-T Stages. PLEASE ASK FOR THE OFFER (Unit: each)84225	MTM-10 Thickness Monitor System for R-T Stages. PLEASE ASK FOR THE OFFER (Unit: each)84225 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

MTM-10 Thickness Monitor System for R-P-T Stage. PLEASE ASK FOR HE OFFER (Unit: each)84226	MTM-10 Thickness Monitor System for R-P-T Stage. PLEASE ASK FOR HE OFFER (Unit: each)84226 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

MTM-20 Thickness Control System. PLEASE ASK FOR THE OFFER (Unit: each)80325	MTM-20 Thickness Control System. PLEASE ASK FOR THE OFFER (Unit: each)80325 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

MTM-20 Thickness Control System for R-T Stage (108auto & SE only). PLEASE ASK FOR THE OFFER (Unit: each)84325	MTM-20 Thickness Control System for R-T Stage (108auto & SE only). PLEASE ASK FOR THE OFFER (Unit: each)84325 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

MTM-20 Thickness Control System for R-P-T Stage (108auto/SE only). PLEASE ASK FOR THE OFFER (Unit: each)84326	MTM-20 Thickness Control System for R-P-T Stage (108auto/SE only). PLEASE ASK FOR THE OFFER (Unit: each)84326 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

Thickness Monitor Crystals (pkg/10) (Unit: each)21300	Thickness Monitor Crystals (pkg/10) (Unit: each)21300 909,50 lei/ea	0,00 lei	Quantity	909,50 lei/ea	0,00 lei

Rotary-Tilting (R-T) Stage (∅150mm) incl: mounting collar with glass spacer, variable rotation speed control and one table to be specified on order: 87434, 87435, 87436, 87439, 87440, 87441, 87442 or 87443. PLEASE ASK FOR THE OFFER (Unit: each)87054	Rotary-Tilting (R-T) Stage (∅150mm) incl: mounting collar with glass spacer, variable rotation speed control and one table to be specified on order: 87434, 87435, 87436, 87439, 87440, 87441, 87442 or 87443. PLEASE ASK FOR THE OFFER (Unit: each)87054 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

∅80mm Table for 1 x slide, 3” wafer (Unit: each)87434	∅80mm Table for 1 x slide, 3” wafer (Unit: each)87434 1.091,50 lei/ea	0,00 lei	Quantity	1.091,50 lei/ea	0,00 lei

∅105mm Table for 3 x slides, 4” wafer (Unit: each)87435	∅105mm Table for 3 x slides, 4” wafer (Unit: each)87435 1.273,30 lei/ea	0,00 lei	Quantity	1.273,30 lei/ea	0,00 lei

∅75mm Table for 2 x petrographic slides (Unit: each)87436	∅75mm Table for 2 x petrographic slides (Unit: each)87436 1.127,80 lei/ea	0,00 lei	Quantity	1.127,80 lei/ea	0,00 lei

∅40mm Table for 1 x ∅32mm SEM mount (Unit: each)87439	∅40mm Table for 1 x ∅32mm SEM mount (Unit: each)87439 327,40 lei/ea	0,00 lei	Quantity	327,40 lei/ea	0,00 lei

∅40mm Table for 4 x 0.5” SEM pin stubs (Unit each)87440	∅40mm Table for 4 x 0.5” SEM pin stubs (Unit each)87440 327,40 lei/ea	0,00 lei	Quantity	327,40 lei/ea	0,00 lei

∅40mm Table for 3 x JEOL ∅12mm SEM mounts (Unit: each)87441	∅40mm Table for 3 x JEOL ∅12mm SEM mounts (Unit: each)87441 472,90 lei/ea	0,00 lei	Quantity	472,90 lei/ea	0,00 lei

∅40mm Table for 4 x JEOL ∅10mm SEM mounts (Unit: each)87442	∅40mm Table for 4 x JEOL ∅10mm SEM mounts (Unit: each)87442 472,90 lei/ea	0,00 lei	Quantity	472,90 lei/ea	0,00 lei

∅40mm Table for 3 x Hitachi ∅15mm SEM mounts (Unit: each)87443	∅40mm Table for 3 x Hitachi ∅15mm SEM mounts (Unit: each)87443 472,90 lei/ea	0,00 lei	Quantity	472,90 lei/ea	0,00 lei

Rotary-Planetary-Tilting (R-P-T) Stage (∅150mm) for 108auto/SE & 108carbonA/SE incl: mounting collar with glass spacer, variable rotation speed control and 4 tables to be specified on order: 87080...87087. PLEASE ASK FOR THE OFFER (Unit: each)87053	Rotary-Planetary-Tilting (R-P-T) Stage (∅150mm) for 108auto/SE & 108carbonA/SE incl: mounting collar with glass spacer, variable rotation speed control and 4 tables to be specified on order: 87080...87087. PLEASE ASK FOR THE OFFER (Unit: each)87053 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

R-P-T 87053 ∅150mm Sample Table for 6 x 12.5mm pin stubs (Unit: each)87080	R-P-T 87053 ∅150mm Sample Table for 6 x 12.5mm pin stubs (Unit: each)87080 291,10 lei/ea	0,00 lei	Quantity	291,10 lei/ea	0,00 lei

R-P-T 87053 ∅150mm Sample Table for 3 x M4 and 3 x 12.5mm pin stubs (Unit: each)87081	R-P-T 87053 ∅150mm Sample Table for 3 x M4 and 3 x 12.5mm pin stubs (Unit: each)87081 327,40 lei/ea	0,00 lei	Quantity	327,40 lei/ea	0,00 lei

R-P-T 87053 ∅150mm Sample Table for 4 x ∅10mm stubs (Unit: each)87082	R-P-T 87053 ∅150mm Sample Table for 4 x ∅10mm stubs (Unit: each)87082 291,10 lei/ea	0,00 lei	Quantity	291,10 lei/ea	0,00 lei

R-P-T 87053 ∅150mm Sample Table for 4 x ∅15mm stubs (Unit: each)87083	R-P-T 87053 ∅150mm Sample Table for 4 x ∅15mm stubs (Unit: each)87083 618,50 lei/ea	0,00 lei	Quantity	618,50 lei/ea	0,00 lei

R-P-T 87053 ∅150mm Sample Table for 1 x ∅25mm mount (Unit: each)87084	R-P-T 87053 ∅150mm Sample Table for 1 x ∅25mm mount (Unit: each)87084 327,40 lei/ea	0,00 lei	Quantity	327,40 lei/ea	0,00 lei

R-P-T 87053 ∅150mm Sample Table for 1 x ∅32mm mount (Unit: each)87085	R-P-T 87053 ∅150mm Sample Table for 1 x ∅32mm mount (Unit: each)87085 363,80 lei/ea	0,00 lei	Quantity	363,80 lei/ea	0,00 lei

R-P-T 87053 ∅150mm Sample Table for 4 x ∅12.5mm stubs (Unit: each)87086	R-P-T 87053 ∅150mm Sample Table for 4 x ∅12.5mm stubs (Unit: each)87086 618,50 lei/ea	0,00 lei	Quantity	618,50 lei/ea	0,00 lei

R-P-T 87053 ∅150mm Adaptor for ∅32mm mount to ∅25mm mount (Unit: each)87087	R-P-T 87053 ∅150mm Adaptor for ∅32mm mount to ∅25mm mount (Unit: each)87087 254,70 lei/ea	0,00 lei	Quantity	254,70 lei/ea	0,00 lei

MTM-10 Thickness Monitor (control unit only) (Unit: each)21000	MTM-10 Thickness Monitor (control unit only) (Unit: each)21000 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

MTM-20 Thickness Controller (control unit only) (Unit: each)21010	MTM-20 Thickness Controller (control unit only) (Unit: each)21010 0,00 lei/ea	0,00 lei	Quantity Sold out	0,00 lei/ea	0,00 lei

Oscillator Unit - spare part for thickness monitors (Unit: each)21101	Oscillator Unit - spare part for thickness monitors (Unit: each)21101 1.309,70 lei/ea	0,00 lei	Quantity	1.309,70 lei/ea	0,00 lei

External Cable (BNC/BNC) - spare part for thickness monitors (Unit: each)21104	External Cable (BNC/BNC) - spare part for thickness monitors (Unit: each)21104 109,20 lei/ea	0,00 lei	Quantity	109,20 lei/ea	0,00 lei

RF10 Vacuum Feedthrough - spare part for thickness measuring system (Unit: each)21201	RF10 Vacuum Feedthrough - spare part for thickness measuring system (Unit: each)21201 1.564,40 lei/ea	0,00 lei	Quantity	1.564,40 lei/ea	0,00 lei

Crystal Holder - spare part for thickness measuring system (Unit: each)21301	Crystal Holder - spare part for thickness measuring system (Unit: each)21301 1.782,60 lei/ea	0,00 lei	Quantity	1.782,60 lei/ea	0,00 lei

Crystal Holder Cable (SMB/SMB) 19cm long for coaters without R-T or R-P-T stage - spare part for thickness measuring system (Unit: each)21305	Crystal Holder Cable (SMB/SMB) 19cm long for coaters without R-T or R-P-T stage - spare part for thickness measuring system (Unit: each)21305 291,10 lei/ea	0,00 lei	Quantity	291,10 lei/ea	0,00 lei

Crystal Holder Cable (SMB/SMB) 30cm long for coaters with R-T or R-P-T stage - spare part for thickness measuring system (Unit: each)21307	Crystal Holder Cable (SMB/SMB) 30cm long for coaters with R-T or R-P-T stage - spare part for thickness measuring system (Unit: each)21307 327,40 lei/ea	0,00 lei	Quantity	327,40 lei/ea	0,00 lei

Adjustable Crystal Head Bracket for R-P-T stage (Unit: each)80211	Adjustable Crystal Head Bracket for R-P-T stage (Unit: each)80211 582,20 lei/ea	0,00 lei	Quantity	582,20 lei/ea	0,00 lei

Crystal Head Bracket for R-T stages - spare part for thickness measuring system (Unit: each)80212	Crystal Head Bracket for R-T stages - spare part for thickness measuring system (Unit: each)80212 145,60 lei/ea	0,00 lei	Quantity	145,60 lei/ea	0,00 lei

Thickness Monitor Hardware kit without MTM-10 control unit (Unit: each)80230	Thickness Monitor Hardware kit without MTM-10 control unit (Unit: each)80230 5.311,40 lei/ea	0,00 lei	Quantity	5.311,40 lei/ea	0,00 lei

Thickness Monitor Hardware kit for R-P-T stage without MTM-10 (Unit: each)84231	Thickness Monitor Hardware kit for R-P-T stage without MTM-10 (Unit: each)84231 5.893,50 lei/ea	0,00 lei	Quantity	5.893,50 lei/ea	0,00 lei

Thickness Monitor Hardware kit for R-T stage without MTM-10 (Unit: each)84232	Thickness Monitor Hardware kit for R-T stage without MTM-10 (Unit: each)84232 5.456,90 lei/ea	0,00 lei	Quantity	5.456,90 lei/ea	0,00 lei

Thickness Controller Hardware kit without MTM-20 control unit (Unit: each)80330	Thickness Controller Hardware kit without MTM-20 control unit (Unit: each)80330 6.475,50 lei/ea	0,00 lei	Quantity	6.475,50 lei/ea	0,00 lei

Thickness Controller Hardware kit for R-P-T without MTM-20 control unit (Unit: each)84331	Thickness Controller Hardware kit for R-P-T without MTM-20 control unit (Unit: each)84331 7.057,60 lei/ea	0,00 lei	Quantity	7.057,60 lei/ea	0,00 lei

Thickness Controller Hardware kit for R-T without MTM-20 control unit (Unit: each)	Thickness Controller Hardware kit for R-T without MTM-20 control unit (Unit: each) 6.621,10 lei/ea	0,00 lei	Quantity	6.621,10 lei/ea	0,00 lei

Rotary Pump Exhaust Filters (pkg/5 ) - spare part for vacuum system (Unit: each)80156	Rotary Pump Exhaust Filters (pkg/5 ) - spare part for vacuum system (Unit: each)80156 2.983,10 lei/ea	0,00 lei	Quantity	2.983,10 lei/ea	0,00 lei

P3 Rotary Pump Oil (0.5 Litre) - consumable for vacuum system (Unit: each)81121	P3 Rotary Pump Oil (0.5 Litre) - consumable for vacuum system (Unit: each)81121 218,30 lei/ea	0,00 lei	Quantity	218,30 lei/ea	0,00 lei

Replacement Pirani Gauge Head (108/108SE) - spare part for vacuum system (Unit: each)80505	Replacement Pirani Gauge Head (108/108SE) - spare part for vacuum system (Unit: each)80505 1.819,00 lei/ea	0,00 lei	Quantity	1.819,00 lei/ea	0,00 lei

Replacement Standard Sample Table (108/108SE) (Table only) (Unit: each)80510	Replacement Standard Sample Table (108/108SE) (Table only) (Unit: each)80510 436,60 lei/ea	0,00 lei	Quantity	436,60 lei/ea	0,00 lei

Replacement Sample Table with Height Adjuster (108/108SE) (Unit: each)80512	Replacement Sample Table with Height Adjuster (108/108SE) (Unit: each)80512 509,30 lei/ea	0,00 lei	Quantity	509,30 lei/ea	0,00 lei

Replacement O-ring Service Kit (108/SE) (Unit: each)80521	Replacement O-ring Service Kit (108/SE) (Unit: each)80521 109,20 lei/ea	0,00 lei	Quantity	109,20 lei/ea	0,00 lei

Replacement Argon Leak/Flush Valve (108auto) (Unit: each)80522	Replacement Argon Leak/Flush Valve (108auto) (Unit: each)80522 1.382,40 lei/ea	0,00 lei	Quantity	1.382,40 lei/ea	0,00 lei

Replacement Vent Valve (108auto) (Unit: each)80523	Replacement Vent Valve (108auto) (Unit: each)80523 1.382,40 lei/ea	0,00 lei	Quantity	1.382,40 lei/ea	0,00 lei

Replacement Pressure Safety Switch (Unit: each)80528	Replacement Pressure Safety Switch (Unit: each)80528 363,80 lei/ea	0,00 lei	Quantity	363,80 lei/ea	0,00 lei

Replacement Gas Control Valve (108auto) (Unit: each)80530	Replacement Gas Control Valve (108auto) (Unit: each)80530 3.747,10 lei/ea	0,00 lei	Quantity	3.747,10 lei/ea	0,00 lei

Replacement Glass Chamber for SE (∅150 x 150mm) (Unit: each)87010	Replacement Glass Chamber for SE (∅150 x 150mm) (Unit: each)87010 1.418,80 lei/ea	0,00 lei	Quantity	1.418,80 lei/ea	0,00 lei

Replacement Glass Spacer for SE (∅150 x 65mm) (Unit: each)87011	Replacement Glass Spacer for SE (∅150 x 65mm) (Unit: each)87011 727,60 lei/ea	0,00 lei	Quantity	727,60 lei/ea	0,00 lei

Replacement Metal Spacer (∅150 x 15mm) (Unit: each)87012	Replacement Metal Spacer (∅150 x 15mm) (Unit: each)87012 800,40 lei/ea	0,00 lei	Quantity	800,40 lei/ea	0,00 lei

Replacement Chamber O-rings for SE (∅150mm, pkg/2)87015	Replacement Chamber O-rings for SE (∅150mm, pkg/2)87015 72,80 lei/ea	0,00 lei	Quantity	72,80 lei/ea	0,00 lei

Replacement Switch/PCB for R-P-T/R-T stages (Unit: each)87066	Replacement Switch/PCB for R-P-T/R-T stages (Unit: each)87066 1.309,70 lei/ea	0,00 lei	Quantity	1.309,70 lei/ea	0,00 lei

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Sputter Coater 108auto/SE