83115 Sputter coater 108auto with thickness controller MTM-20
Cressington 108 Sputter Coaters are ideal for routine sample preparation. Compact, economical and simple to operate, they offer rapid pumpdown times, fine-grain coatings and negligible sample heating. Cool, fine-grain sputtering is achieved with a very efficient dc magnetron head. A quick-change target method allows a range of metals to be used. The variable, safety-interlocked sputtering supply is not influenced by vacuum level.
The Cressington 108auto sputter coater offers the choice of manual or automatic operation. The specification also includes a vent gas inlet and argon purge control.
In automatic mode the coater can be controlled in two ways. The digital timer can be used to give repeatable coatings or the (optional) MTM-20 controller can be used to terminate the sputtering process at the desired thickness.
The sputter current and argon gas pressure are set independently for the desired coating conditions.
Pumping System
The modular desktop design combines sputter control unit, pumping system and thickness monitor into an area of approximately 16" x 24" (42cm x 60cm). The desktop pumping system is connected with a metal coupling system. The compact high speed rotary pump is mounted on an anti-vibration table with a desktop base.
The pumping system can be easily extended into a dual pumping system to accommodate the Cressington Sputter Coater along side a Cressington Carbon Coater.
SPECIFICATION
Automatic sputter coater
Chamber size
120mm Ø x 120mm high (4.75" x 4.75")
Sputter head
Low voltage planar magnatron Quick target change Wrap-around dark-space shield
Sputter target
Gold, Gold/Palladium or Platinum targets on order 57mm Ø x 0.1mm thick
Sputter supply
Microprocessor based Safety interlocked Current control independent of vacuum Digitally selectable current (10, 20, 30 or 40mA)
Sample table
Holds 12 SEM ½" stubs Height adjustment through 60mm
Analogue metering
Vacuum, Atm - 0.001mb Current, 0 - 50mA
Control method
Automatic operation of gas purge and leak functions Automatic process sequencing Full manual override Digital timer, 5 - 300 seconds with pause Automatic vent
