Tungsten, Molybdenum and Tantalum Boats
Tungsten, Molybdenum and Tantalum Boats
Two of the tungsten boats listed on this page are a combination of the refractory metal tungsten and an alumina barrier (Al2O3) coating over the tab area. The exposed metal area comprising the bottom of the boat allows the sample to be in good thermal contact with the source. The barrier will tend to help concentrate the heat towards the center. The alumina barrier will inhibit an evaporant (if used as a sample instead of an aperture) from creeping toward the heat sink or from wetting the entire boat.
The tungsten boats, baskets and filaments are manufactured from high grade tungsten. Of all metals in pure form, tungsten has the highest melting point (3422°C / 6192°F), the lowest vapor pressure at temperatures above 1650°C (3000°F) and has the highest tensile strength. Tungsten also has the lowest coefficient of thermal expansion of any pure metal. This combination of properties makes tungsten the ideal material for evaporation sources. During evaporation, it can alloy with some materials such as Al or Au. In this case, another evaporation source material should be used such as alumina coated boats or baskets. Other materials useful for evaporation sources are molybdenum and tantalum. Please see the Deposition Techniques Table for extensive information on vacuum deposition and suitability of evaporation sources.
See also vacuum evaporation materials.
Tungsten Boats with Alumina Barriers
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84-2 |
3-1/4" L x 1/2" W (82.5 x 12.7mm), trough: 1/4" W x 3/4" L (6.35 x 19.05mm) x 3/32" (2.38mm) deep. Tungsten thickness: 0.010" (0.25mm) Al2O3 = 0.010" (0.25mm) coating Settings: 0.95V/136A/129W for 1200°C |
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84-3 |
4" L x 1" W (101.6 x 25.4mm), trough: 5/8" W x 1-3/4" L (15.9 x 44.5mm) x 3/32" (2.4mm) deep. Tungsten thickness: 0.010" (0.25mm) Al2O3 = 0.010" (0.25mm) coating Settings: 1.43V/264A/378W for 1200°C |
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Alumina Coated Evaporation Source
84-4 Â
Replaces alumina crucibles for some specific applications. Good heat transfer yet has alumina inertness. Evaporant does not wet the alumina: no resistant change of the boat when evaporant melts. Due to the non-wetting characteristic, the evaporant forms a sphere when melted resulting in a point source.
4" L x 1/2" W (101 x 12mm). Trough is a dimple: 1/2" diameter and 1/8" deep (12 x 3mm).
Alumina coated thickness: 0.005" (0.127mm)
Tungsten thickness: 0.010" (0.25mm)
Settings: 1.29V/190A/245W for 1200°C
Tungsten Boats Without Alumina Barriers
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84-5 |
4" L x 1" W (101.6 x 25.4mm), trough: 1" W x 2-1/8" L (25.4 x 58.8mm) x 3/32" (2.4mm) deep. Tungsten thickness: 0.010" (0.25mm) Settings: 3.01V/391A/1177W for 1800°C |
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84-7 |
4" L x 1/2" W (101.6 x 12.7mm), trough: 1/2" W x 1-1/2" L (12.7 x 38.1mm) x 1/8" (3.2mm) deep. Tungsten thickness: 0.010" (0.25mm). Settings: 2.90V/196A/568W for 1800°C |
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84-8 |
4" L x 3/4" W (101.6 x 19mm), trough: 1/2" W x 1-1/2" L x (12.7 x 38.1mm) x 1/8" (3.2mm) deep. Tungsten thickness: 0.010" (0.25mm). Settings: 3.28V/300A/984W for 1800°C |
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84-36 |
Tungsten evaporation boat with narrow section trough, 3.5" x 3/4" (89x19mm). Trough is 1/4" W x 1/8" D x 3/4" L (6.35 x 3.2 x 19mm). Tungsten thickness: 0.005" (0.127mm) Settings: 1.95V/100A/195W for 1800°C |
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84-37 |
Tungsten evaporation boat with narrow section trough, 3.5" x ¾" (89x19mm). Trough is 1/4" W x 1/8" D x 3/4" L (6.35x3.2 x 19mm). Tungsten thickness: 0.010" (0.254mm) Settings: 1.47V/158A/232W for 1800°C |
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84-38 |
Tungsten evaporation boat with narrow section trough, 4" x ¾" (102x19mm). Trough is ¼"Wx1/8"Dx1-1/2"L (6.35x3.2x38mm). Tungsten thickness: 0.005" (0.127mm) Settings: 2.76V/96A/265W for 1800°C |
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84-6 |
3" L x 3/4" W (76.2 x 19.5mm), trough: 5/8" W x 1" L (15.9 x 25.4mm) x 1/8" (3.18mm) deep. Tungsten thickness: 0.005" (0.127mm) Settings: 3.04V/199A/605W for 1800°C |
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84 |
1-1/4" L x 3/8" W (32 x 9.5mm), trough: 3/8" W x 1/2" L (9.5 x 12.7mm) x 1/32" (0.8mm) deep. Tungsten thickness: 0.002" (0.05mm) |
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80-30 |
Small tungsten evaporation boat with dimple, 1-7/8" x 1/2 ( 47.6 x 12.7mm). Dimple: 3/8" (9.5mm) diameter x 1/8" (3.2mm) deep. Tungsten thickness: 0.005" (0.127mm) Settings: 1.83V/143A/262W for 1800°C |
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84-31 |
Small tungsten evaporation boat with dimple, 1-7/8" x 1/4" ( 47.6 x 6.35mm). Dimple: 3/16" (4.76mm) diameter x 1/16" (1.6mm) deep. Tungsten thickness: 0.005" (0.127mm) Settings: 1.69V/80A/135W for 1800°C |
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84-32 |
Small tungsten evaporation boat with dimple, 1-7/8" x 1/2" ( 47.6 x 12.7mm). Middle section raised. Dimple: 7/16" (11.1mm) diameter x 3/32" (2.38mm) deep. Tungsten thickness: 0.005" (0.127mm) Settings: 1.83V/145A/265W for 1800°C |
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84-33 |
Small tungsten evaporation boat with dimple, 1-7/8" x 1/2" ( 47.6 x 12.7mm). Middle section recessed. Dimple: 7/16" (11.1mm) diameter x 1/8" (3.2mm) deep. Tungsten thickness: 0.005" (0.127mm) Settings: 1.88V/144A/271W for 1800°C |
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84-34 |
Small tungsten evaporation boat with dimple, 1-7/8" x 1/4 " ( 47.6x6.35mm). Middle section raised. Dimple: 3/16" (4.76mm) diameter x 1/16" (1.6mm) deep. Tungsten thickness: 0.005" (0.127mm) Settings: 2.03V/76A/154W for 1800°C |
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84-35 |
Small tungsten evaporation boat with dimple, 1-7/8" x 1/2" ( 47.6x12.7mm). Decreased cross section. Dimple: 7/16" (11.1mm) diameter x 1/8" (3.2mm) deep. Tungsten thickness: 0.005" (0.127mm) Settings: 2.57V/129A/332W for 1800°C |
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Tantalum directional Boat Sources
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84-41 |
Directional (covered) boat source for small area / thick deposition. Efficient source. 3" x 1/4" (76 x 6.4mm) with 1/8" (3.2mm) hole. Tantalum thickness: 0.005" (0.127mm) Settings: 1.43V/267A/267W for 1600°C |
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84-51 |
Directional (covered) boat source for small area / thick deposition. Efficient, small source. 1-7/8" x 1/4" (47.6 x 6.4mm) with 1/8" (3.2mm) hole. Tantalum thickness: 0.005" (0.127mm) Settings: 1.07V/131A/140W for 1600°C |
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Molybdenum directional Boat Sources
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Covered boat source for directional deposition. Efficient, small source allows fore either small area deposition or thicker deposition in a small area. 1-7/8" x 3/4" (47.6 x 19.2mm) with 1/8" (3.2mm) hole. Molybdenum thickness: 0.005" (0.127mm) Settings: 0.79V/251A/198W for 1400°C |
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Covered boat source for directional deposition. On-axis hole. 1-7/8" x 3/4" (47.6 x 19.2mm) with 1/8" (3.2mm) hole. Molybdenum thickness: 0.005" (0.127mm) Settings: 0.83V/248A/206W for 1400°C |
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