Available as NIST Traceable or as Certified against NIST Standard
Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration. Scale lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.
These calibration standards are unique, economically priced, yet fully-featured and traceable for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.
The Pelcotec™ CDMS-XY Calibration Standard is available with two feature size ranges, which are both offered as traceable and as certified standards, making a total of 4 unmounted versions:
Pelcotec™ CDMS-XY-1T Fully traceable with features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications. Representative CDMS-XY-1T Traceable Certificate (214KB PDF)
Pelcotec™ CDMS-XY-1C Individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications. Representative CDMS-XY-1C Conformance Certificate (270KB PDF)
Pelcotec™ CDMS-XY-0.1C Individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications. Representative CDMS-XY-0.1C Conformance Certificate (261KB PDF)
Feature sizes for the Pelcotec™ CDMS-XY-1T and -1C are: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.
Feature sizes for the Pelcotec™ CDMS-XY-0.1T & 0.1C are: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
Comparison Table Below
Pelcotec™ CDMS-XY-1
Pelcotec™ CDMS-XY-0.1
Substrate: Silicon
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Substrate size: 2.5 x 2.5mm
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Substrate thickness: 525 ±10µm
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Feature size: 2mm to 1µm
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Feature size: 500, 250 and 100nm
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Feature material: 50nm Cr (2mm - 5µm)
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Feature material: 20nm Cr/50nm Au (2µm and 1µm)
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Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm)
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Traceable at the wafer level to NIST
CDMS-XY-1T versions
CDMS-XY-0.1T versions
Direct certification of CDMS chip to a NIST standard
The Pelcotec™ CDMS-XY Critical Dimensions and Magnification Standards are made on anultra flat silicon substratewith a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm. The Cr and Au/Cr on Si provides excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a low power plasma cleaner.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Plus, each Pelcotec™ CDMS calibration standard has a unique identification number.
They are available either unmounted or mounted onSEM holders A-R. For AFM applications the Pelcotec™ CDMS is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.
The standard may also be prepared on a custom mount of your choice.
