PELCO® Video Alignment Microscope (VAM)

For complete product specifications and PELCO® VAM accessories click here.

The PELCO® Video Alignment Microscope is an essential accessory for the PELCO® Dimpler™, particularly for deprocessing/delayering and site-specific polishing applications. It allows easy targeting of an area of interest, and precise control of the position, size, and shape of the bottom of the dimple or thin area of the specimen. The VAM has a magnification of 100X or 200X (digital), with a 1024 x 768 pixel TFT display. The sample stage fits the PELCO® Dimpler™ platen sets using the same hexagonal alignment post. A reticle allows precise alignment of the area of interest to the center of rotation of the base while dimpling.

The PELCO® Video Alignment Microscope may also be used as an inspection scope along with our Lapping Fixtures and other instruments.

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83070 Kit for Large Samples

 

The typical range in thickness for dimpled samples is 100 microns to 760 microns. The sensor sensitivity range is at maximum 2mm, which has generally limited operation to a small range of sample thickness. This kit provides a set of shims and a larger diameter tool that allows both taller and wider samples to be dimple polished. It greatly extends the utility for delayering larger semiconductor samples, and for other selective area polishing applications. The kit extends the maximum sample size to ~0.5" (12mm) in height and up to 3" (75mm) in diameter. It can be used with any of the PELCO® Dimpler™ tool or platen sets, and is fully backwards compatible with all PELCO® and South Bay Technology D500i Dimplers.

Shown with Oversized Tool
included in kit

Shown with standard
Large Area Tool

Shown with standard 1/2"
Tool and Platen Set

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PELCO® Abrasive Dispenser

An ideal accessory for the PELCO® Dimpler™, the PELCO® Abrasive Dispenser can automate the dispense of slurry during dimple polishing, saving operator time and allowing consistent polishing and delayering recipes to be created. The Syringe Stand is designed for the PELCO® Dimpler™ and is backwards compatible with South Bay Techology's D500i, but can also be used with our other tools where slurries and abrasive suspensions are needed (i.e., the PELCO® easiCore™, PELCO® Precision Wire Saw™, XP 20 Grinder/Polisher).

With 40 programmable memory slots, multiple recipes can be stored and recalled for use. Teach mode allows the user to set a dispense time from manual mode. Cycle mode allows for repeated off and on timed dispense using a precision timer of 0.01-99.99 seconds. The PELCO® Abrasive Dispenser can also be used in manual mode by dispensing the desired amount of suspension using the control panel or a foot switch (included).

The accessories included when ordering the PELCO^® Abrasive Dispenser (#83075) are:

• (1) PELCO® Slurry Mat™ (#83076)
• (1) Syringe Stand (#83075-1)
• (1) Syringe Adapter (#83075-10)
• (3) 30cc Syringe Barrels (#83075-33)
• (3) Syringe Pistons (#83075-32)
• (3) Syringe Tip Caps (#83075-31)
• (3) Syringe Sealing Caps (#83075-30)
• (3) 22G Dispense Needles (#83075-22)
• (3) 18G Dispense Needles (#83075-18)
• (3) 14G Dispense Needles (#83075-14)

PELCO^® Abrasive Dispenser
on the PELCO^® Dimpler™
(#83075 on #84000)

Syringe Stand
(#83075-1)

Syringe Adapter
(#83075-10)

Dispense Needles
(#83075-14, #83075-18, #83075-22)

Sealing Cap, Tip Cap, Piston, & Syringe Barrel
(#83075-30, #83075-31, #83075-32, #83075-33)

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PELCO® Slurry Mat™ for the PELCO® Dimpler™

PELCO^® Slurry Mat™ Front
(#83076)

PELCO^® Slurry Mat™ Back
(#83076)

Meant to protect the PELCO® Dimpler™ from damage due to slurry overrun, the PELCO® Slurry Mat™ is made of chemical-resistant silicone rubber. It acts as a catch for small volumes  and a drain for larger volumes of used slurry. Pair the Slurry Mat™ with a beaker or other vessel of your choice.

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PELCO® Micrometer Measuring Stand

The PELCO® Micrometer Measuring Stand is designed with a large accessible area for measuring flatness of mounted samples for dimpling or other precision thinning applications. The granite slab has a maximum runout of 1.26µm (0.000050"), allowing for precise checking of wax or temporary adhesive mounted specimens prior to further processing.

Suitable for both small and large samples, the digital micrometer is accurate to +/- 1µm (0.000039"). The long arm allows for comparison, flatness, and dimple depth testing of large specimens such as full wafers or circuit boards where a target chip is being dimpled or delayered.

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PELCO® Dimpler™ Platen Sets

Standard Platen Set
(#83027)

Adjustable Platen Set
(#83032)

Large Area Platen Set
(#83042)

There are two platen sets intended for 3mm standard disc samples, the Standard Platen Set, with the through-hole, (83027) and the Adjustable Platen Set (83032). The Standard Platen Set consists of the Sapphire Flat (83001), Standard Platen (83002), Slurry Ring (83003), and Magnetic Base (83008). The through-hole allows inspection of the sample while backlit. This is very useful to determine when a hole forms in metal samples, or when a silicon cross-section or similar sample has become thin. The Adjustable Platen Set consists of the Sapphire Flat (83001), Adjustable Platen (83004), Slurry Ring (83003), and Magnetic Base (83008). The adjustable base provides a crosshair for easy sample positioning, and is cross-compatible with our Lapping Fixtures, allowing the sample to be efficiently thinned and flat polished prior to dimpling without having to demount it.

The Large Area Platen set is designed to work with the Large Area Tools for selective area polishing applications such as semiconductor delayering and deprocessing. It may also be useful anywhere a larger specimen or area needs to be polished, or a shallower dimple is desired. The set consists of the 83040 Large Area Platen and the 83007 Large Area Magnetic base. The platen is 25mm (1") in diameter and flat, to allow easy mounting of large flat samples such as electronic chips or dies up to 22 x 22 mm. Larger samples can be accommodated as long as they are sufficiently rigid.

The 83002 Standard Platen may also be used for X-Y stage alignment in combination with the 3i tool supplied with the Dimpler.

A new addition to the Dimpler™ Platen lineup is a variant of the large area platen that accommodates 1" pin stub mounts (83043), allowing for easy transfer between the Dimpler™ and the SEM. It accepts 16144-9 6mm pin stub mounts, which are securely held in place with dual set screws. A pin stub and hex key are included with the mount.

Sapphire Flat (#83001)	Standard Platen (#83002)	Slurry Ring (#83003)	Adjustable Platen (#83004)
Large Area Magnetic Base (#83007)	Standard Magnetic Base (#83008)	Large Area Platen (#83040)	Pin Stub Platen for Large Area (#83043)

 

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PELCO® Dimpler™ Tools

STANDARD TOOLS:

Tool 1i (#83010)	Tool 2iT (#83014)	Tool 2iM (#83013)
Tool 3i (#83012)	Tool 4iT (#83016)	Tool 4iM (#83015)

 

LARGE AREA TOOLS:

(#83011)	(#83036)	(#83038)	(#83037)
(#83039)	(#83044)	(#83045)	(#83047)

 

The standard dimpling tools include flatting and dimpling tools, in both unpadded versions for faster material removal and padded versions for polishing. Tools are made from 316 stainless steel. Flatting tools such as Tools 1i and 2i, and the Large Area Tools have a flat profile while Dimpling Tools such as 3i and 4i have a radiused profile to produce a pronounced dimple. The flatting tools will still produce a dimple with the lowest point at the center of rotation, but it will have a much shallower height differential across the dimple.

A variety of padded and unpadded tools are available to meet many dimple polishing process requirements. The 83031 standard tool set for 3mm samples contains 6 tools, part numbers 83010, 83016, 83015, 83012, 83013, and 83014 in a divided polystyrene box. The 83041 large area tool set contains 4 tools, part numbers 83011, 83036, 83038, and 83037 in a divided polystyrene box. Available tools are pictured above.

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PELCO® Dimpler™ Tool & Platen Kits

These kits are intended to help assist in choosing application-specific tools and platens. This can be useful when purchasing a new PELCO® Dimpler™ or when purchasing tools for a new user. 

The Semiconductor Kit contains everything necessary for semiconductor delayering including 4 dimpling tools, a platen set and repadding materials. The TEM Kit is intended for traditional dimpling/sample thinning of 3mm TEM samples and includes 6 dimpling tools and a standard platen set. See full kit listings below for details.

The Semiconductor Tool & Platen Kit (#83065) includes the following:

• 83011 Large Area Tool, 1i, 0.125" width
• 83036 Large Area Tool, 0.25" width
• 83038 Large Area Tool, 0.25" width, counterbored x2
• 83037 Large Area Tool, 0.5" width
• 83061 Repadding Strips for Large Area Tools
• 83060 Repadding Roller Tool Kit
• 83042 Large Area Platen Set

The TEM Tool & Platen Kit (#83066) includes the following:

• 83010 Tool 1i, Flatting
• 83014 Tool 2iT, padded, non-woven
• 83013 Tool 2iM, padded, low-nap rayon
• 83012 Tool 3i, Dimpling
• 83016 Tool 4iT, Dimpling, padded, non-woven
• 83015 Tool 4iM, Dimpling, padded, low-nap rayon
• 83027 Standard Platen Set

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PELCO® Dimpler™ Tool Repadding

Repadding Strips for 1/4" and 1/2" Tools
(#83062, 83063)

Repadding Roller Kit
(#83060)

Repadding Roller in use with a 1/4" Large Area Tool
(#83060, 83062, 83036)

Over time, polishing cloths may wear or become contaminated, particularly in delayering and selective polishing applications. Precut self-adhesive repadding kits are available for the Large Area Dimpler Tools, and for the 83013. A Small Toolkit (83060) for rolling on the new padding material is also available. The supplied cloth is similar in performance to a Final C cloth. Instructions on repadding can be found in the Technical Note (175KB PDF)

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Silicone Rubber Lab Mats

Reusable, reliable, and reversible

• Ideal for every type of laboratory and more specialized areas such as cold rooms, clean rooms, sterile suites and areas where high sterility is a requirement
• The lab mats can be used with items such as centrifuges, vortex mixers, hot plates, stirrers, pipettes, and so much more
• Reversible, with two color/design options available
• Design includes retaining strip with internal metal inserts for retention of magnetic objects, such as stir bars to help keep items organized
• Lip around the edge can hold approximately 300mL of liquid
• Keeps benchtops clean and safe from stains, spills and wear
• Reusable, helps reduce waste making it a more environmentally friendly option over disposable mats
• Anti-skid surface helps keep the mat and items in place
• Noise dampening, reducing sound from the vibration of common bench top equipment
• Made from a durable FDA food grade silicone rubber material that creates a stain resistant washable working surface
• Chemical resistance: chemically inert and does not react with most chemicals
• Can be easily cleaned using any standard disinfectant by simply wiping it and is dishwasher safe
• Multiple colors available in each style for color coding options
• Protect counter tops from hot items up to 200°C (392°F)
• Mats can be rolled up for compact storage
• Large working surface, 35 x 60 x 0.2cm (14 x 23.5 x 1"), accommodates benchtop equipment, weigh boats, stir bars, scales, etc.
• Autoclavable at 121°F for 15 minutes