Kimball Lanthanum Hexaboride (LaB6) Cathodes for Electron Microscopes
Kimball Lanthanum Hexaboride (LaB6) Cathodes for Electron Microscopes
Heating current path through precision-machined, single-piece carbon rod and mounting strips; sub-base provides rigidity and easier mounting.
The Kimball Physics ES-423E (Extended Life) Lanthanum Hexaboride Cathode is a high performance, resistively heated, thermionic electron source. It is currently used in many electron optical systems: SEM's, TEM's, microprobes, electron lithography systems, etc. This superior LaB6 source gives a greater brightness (higher current density), lower energy spread (better resolution) and a longer lifetime than standard tungsten filaments. Lifetimes in excess of 6 months of continuous operation are regularly achieved in commercial SEM's and TEM's with suitable gun vacuum (10-7 torr or better). The standard emitter is a 15µm diameter <100> oriented single crystal surface mounted on the end of a single piece, stress-free, carbon heater rod, held in place by a carbon ferrule. The single piece carbon heater rod has a precision machined 100µm slot along the axis to direct the heating current; the result is no high temperature carrying high temperature joints. The design together with a high degree of symmetry keeps mechanical movements small which results in increased stability. The small physical size fits most Wehnelt cylinders with ease. Another advantage of the Kimball Physics LaB6 cathode is the reduced material loss which means less Wehnelt contamination; again this results in greater stability compared to other types of LaB6 cathodes.
For further information see Technical Bulletins at bottom of page.
For use in:
- Scanning Electron Microscopes
- Transmission Electron Microscopes
- Electron Micro Probe Analyzers
- Electron Lithography Systems
- Electron Accelerators
Unused LaB6 crystal mounted on carbon heater rod, and held in place by precision carbon ferrule; note roundness and smoothness of microflat.
LaB6 crystal mounted on an AEI/Leica base
Featuring:
Extended lifetime
- Thousands of hours in clean vacuum
- Guaranteed life (measured in surface loss)
- Guaranteed against mounting structure failure
Designed with built-in stability
- Thermal / chemical / mechanical / electrical stability
- Precision machined carbon mounting
- High over-temperature tolerance
High brightness/low energy spread
- Oriented single-crystal
- Best quality/high purity material
- Low work function
- Improved resolution
Accurate microflats
- Superior optics/controlled source size
- Standard diameters available
AEI/Leica/ZEISS |
AMRAY |
FEI/Philips |
ZEISS/TESCAN |
Hitachi S |
Jeol K |
ISI/ABT/Topcon |
ETEC |
Dimensions for EM Filament Bases (for Tungsten/Lab6) Filaments
Base Type | Diameter of Ceramic Disc (mm) |
Diameter of Pins (mm) |
Center Distance of Pins (mm) |
---|---|---|---|
AEI | 12.0 | 1.0 | 6.45 |
FEI/PHILIPS | 26.0 | 1.0 | 5.0 |
JEOL K-type | 28.0 | 1.2 | 8.0 |
HITACHI S-type | 9.8 | 1.2 | 2.7 |
ZEISS (DSM & TEM), LEO (1450 & TEM), TESCAN | 19.8 | 1.0 | 5.0 |
AMRAY (except 1200) | 26.1 | 1.0 | 5.0 |
ISI/ABT/TOPCON 2 pins |
23.3 | 1.2 | 11.9 |
ISI/ABT/TOPCON | 23.4 | 1.2 | 12.0 |
Electron Source Performance Comparison
Emitter Type | Thermionic | Thermionic | Schottky FE | cold FE |
---|---|---|---|---|
Cathode material | W |
LaB6 |
ZrO/W (100) |
W(310) |
Operating temperature [K] | 2,800 |
1,900 |
1,800 |
300 |
Cathode radius [nm] | 60,000 |
10,000 |
< 1,000 |
< 100 |
Effective source radius [nm] | 15,000 |
5,000 |
15 (*) |
2.5(*) |
Emission current density [A/cm2] | 3 | 30 | 5,300 | 17,000 |
Total emission current [µA] | 200 | 80 | 200 | 5 |
Normalized brightness [A/cm2.sr.kV] | 1.104 | 1.105 | 1.107 | 2.107 |
Maximum probe current [nA] | 1000 | 1000 | 10 | 0.2 |
Energy spread @ cathode [eV] | 0.59 | 0.40 | 0.31 | 0.26 |
Energy spread @ gun exit [eV] | 1.5 - 2.5 | 1.3 - 2.5 | 0.35 - 0.7 | 0.3 - 0.7 |
Beam noise [%] | 1 | 1 | 1 | 5 - 10 |
Emission current drift [%/h] | 0.1 | 0.2 | < 0.5 | 5 |
Operating vacuum hPa/mbar | < 1.10-5 | < 1.10-6 | < 1.10-8 | < 1.10-10 |
Typical Cathode life [h] | 100 | > 1000 | > 5000 | > 2000 |
Cathode regeneration | not required | not required | not required | every 6 to 8 hours |
Sensitivity to external influence | minimal | minimal | low | high |
Technical Bulletins:
- User Information for ES-423E Extended Life LaB6 Cathode (91KB PDF)
- General Guidelines for Operating LaB6 Cathodes (1,653KB PDF)
- The Relationship between LaB6 and Cathode Life and Gun Vacuum (1,550KB PDF)
- Emission Drift -- LaB6 and Gun Stability (1,218KB PDF)
- Oxygen Activation of LaB6 Cathodes--The Double Saturation Effect (632KB PDF)
- Cathode Style 60-06 (60° included cone angle, 6µm diameter flat) (832KB PDF)
- LaB6 Cathode Operating Instructions for LEICA / Cambridge Stereoscan Series SEM's (2,104KB PDF)
- Recovery of Emission from LaB6 Cathodes Following a Vacuum Dump (335KB PDF)
- LaB6 Thermodynamics (142KB PDF) Data table
- LaB6 Surface Recession vs Temperature (47KB PDF) Graph
- LaB6 Surface Recession vs Theoretical Brightness (58KB PDF) Graph
Documentation
Documentation







