DLC AFM Probes
DLC AFM Probes

DLC coated AFM tip close-up
Typical radius of uncoated AFM tip
8nm
Resulting AFM tip radius with the coating
<20nm
Full AFM tip cone angle
40°
Total AFM tip height
12-18µm
AFM Probe material
n-type silicon
AFM Tip coating
Hard diamond-like carbon (DLC)
Detector coating
Aluminum
The AFM probes in series HARD feature a 20 nm wear-resistant DLC coating applied to the tip side of the AFM cantilever. The thin DLC coating offers enhanced AFM tip durability without a significant penalty on resolution. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer.
The HQ:NSC, HQ:CSC and HQ:XSC AFM tips have trihedral shape with a full cone angle of 40° and even smaller at the last 200nm of the AFM tip apex.
The aluminum reflective coating enhances the laser reflectivity of the AFM cantilever by approximately 2.5 times.
1 AFM Cantilever Series

| AFM Cantilever | Resonance Frequency, kHz | Force Constant, N/m | ||||
|---|---|---|---|---|---|---|
| min | typical | max | min | typical | max | |
| 14 series | 110 | 160 | 220 | 1.8 | 5.0 | 13 |
| 15 series | 265 | 325 | 410 | 20 | 40 | 80 |
| 16 series | 170 | 190 | 210 | 30 | 45 | 70 |
| 17 series | 10 | 13 | 17 | 0.06 | 0.18 | 0.40 |
| 18 series | 60 | 75 | 90 | 1.2 | 2.8 | 5.5 |
3 AFM Cantilevers Series


| AFM Cantilever | Resonance Frequency, kHz | Force Constant, N/m | |||||
|---|---|---|---|---|---|---|---|
| min | typical | max | min | typical | max | ||
| 35 series | Cantilever A | 130 | 205 | 290 | 2.7 | 8.9 | 24 |
| Cantilever B | 185 | 300 | 430 | 4.8 | 16 | 44 | |
| Cantilever C | 95 | 150 | 205 | 1.7 | 5.4 | 14 | |
| 36 series | Cantilever A | 30 | 90 | 160 | 0.1 | 1.0 | 4.6 |
| Cantilever B | 45 | 130 | 240 | 0.2 | 2 | 9 | |
| Cantilever C | 25 | 65 | 115 | 0.06 | 0.6 | 2.7 | |
4 AFM Cantilevers Series

| AFM Cantilever | Resonance Frequency, kHz | Force Constant, N/m | |||||
|---|---|---|---|---|---|---|---|
| min | typical | max | min | typical | max | ||
| 11 series | Cantilever A | 12 | 15 | 18 | 0.1 | 0.2 | 0.4 |
| Cantilever B | 60 | 80 | 100 | 1.1 | 2.7 | 5.6 | |
| Cantilever C | 115 | 155 | 200 | 3 | 7 | 16 | |
| Cantilever D | 250 | 350 | 465 | 17 | 42 | 90 | |
Application
HARD DLC coated AFM probes are designed for routine AFM measurements of robust samples, especially when the scan size is larger than 2µm. In large are scans the lateral resolution is of less importance compared to other characteristics of the AFM tip such as mechanical durability. Furthermore, a number of AFM applications require blunt AFM tips for quantitative measurements of various physical properties of the sample (friction, indentation, adhesion).

Height image of polystyrene-polybutadiene-polystyrene triblock copolymer. Scan obtained in Tapping mode using a DLC coated AFM tip with radius about 30nm. Image courtesy of S. Magonov (Bruker).
HQ:NSC15/Hard/Al BS
Long Scanning, DLC Hardened Tapping Mode AFM Probe
AFM probes of the HQ:NSC15 series are generally used in tapping mode for imaging hard samples when high topographic and phase contrast are necessary. These AFM probes are also suitable for non-contact mode.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilever. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilever by approximately 2.5 times.
Hard Diamond-Like-Carbon



AFM Probe Specifications
AFM Tip
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Rotated | 15 µm (12 - 18 µm) | 40° | < 20 nm |
AFM Cantilever
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever A | Beam | 40 N/m(20 - 80 N/m) | 325 kHz(265 - 410 kHz) | 125 µm(120 - 130µm) | 30 µm(27 - 33µm) | 4 µm(3.5 - 4.5 µm) |
All typical values
HQ:NSC14/Hard/Al BS
Long Scanning, DLC Hardened, Soft Tapping Mode AFM Probe
AFM probes of the HQ:NSC14 series are generally used in tapping mode for imaging relatively soft samples to obtain better phase contrast and reduce surface deformations caused by the tapping AFM tip.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilever. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilever by approximately 2.5 times.
Hard Diamond-Like-Carbon



AFM Probe Specifications
AFM Tip
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Rotated | 15 µm (12 - 18 µm) | 40° | < 20 nm |
AFM Cantilever
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever A | Beam | 5 N/m(1.8 - 13 N/m) | 160 kHz(110 - 220 kHz) | 125 µm(120 - 130µm) | 25 µm(22 - 28µm) | 2.1 µm(1.6 - 2.6 µm) |
All typical values
HQ:NSC35/Hard/Al BS
AFM Probe with 3 Different Long Scanning, DLC Hardened Soft Tapping Mode AFM Cantilevers
AFM probes of the HQ:NSC35 series have three different soft tapping mode AFM cantilevers on one side of the holder chip. They can be used in various applications.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilevers. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilevers by approximately 2.5 times.
Hard Diamond-Like-Carbon


AFM Probe Specifications
AFM Tip
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Rotated | 15 µm (12 - 18 µm) | 40° | < 20 nm |
AFM Cantilever
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever A | Beam | 8.9 N/m(2.7 - 24 N/m) | 205 kHz(130 - 290 kHz) | 110 µm(105 - 115µm) | 35 µm(32 - 38µm) | 2 µm(1.5 - 2.5 µm) |
| Cantilever B | Beam | 16 N/m(4.8 - 44 N/m) | 300 kHz(185 - 430 kHz) | 90 µm(85 - 95µm) | 35 µm(32 - 38µm) | 2 µm(1.5 - 2.5 µm) |
| Cantilever C | Beam | 5.4 N/m(1.7 - 14 N/m) | 150 kHz(95 - 205 kHz) | 130 µm(125 - 135µm) | 35 µm(32 - 38µm) | 2 µm(1.5 - 2.5 µm) |
All typical values
HQ:NSC16/Hard/Al BS
Long Scanning, DLC Hardened Tapping Mode AFM Probe with Long AFM Cantilever
AFM probes of the HQ:NSC16 series have AFM cantilevers with a high spring constant and low resonance frequency (below 250 kHz) that can be used in tapping mode in SPMs with low-frequency feedback loops. These AFM probes also fit SPM systems that do not support short AFM cantilever arms.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilever. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilever by approximately 2.5 times.
Hard Diamond-Like-Carbon



AFM Probe Specifications
AFM Tip
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Rotated | 15 µm (12 - 18 µm) | 40° | < 20 nm |
AFM Cantilever
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever A | Beam | 45 N/m(30 - 70 N/m) | 190 kHz(170 - 210 kHz) | 225 µm(220 - 230µm) | 37.5 µm(34.5 - 40.5µm) | 7 µm(6.5 - 7.5 µm) |
All typical values
HQ:NSC36/Hard/Al BS
AFM Probe with 3 Different Long Scanning, DLC Hardened Soft Tapping Mode AFM Cantilevers, Low Force Constant
AFM probes of the HQ:NSC36 series have three different soft tapping mode AFM cantilevers on one side of the holder chip. They can be used in various applications.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilevers. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilevers by approximately 2.5 times.
Hard Diamond-Like-Carbon


AFM Probe Specifications
AFM Tip
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Rotated | 15 µm (12 - 18 µm) | 40° | < 20 nm |
AFM Cantilever
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever A | Beam | 1 N/m(0.1 - 4.6 N/m) | 90 kHz(30 - 160 kHz) | 110 µm(105 - 115µm) | 32.5 µm(29.5 - 35.5µm) | 1 µm(0.5 - 1.5 µm) |
| Cantilever B | Beam | 2 N/m(0.2 - 9 N/m) | 130 kHz(45 - 240 kHz) | 90 µm(85 - 95µm) | 32.5 µm(29.5 - 35.5µm) | 1 µm(0.5 - 1.5 µm) |
| Cantilever C | Beam | 0.6 N/m(0.06 - 2.7 N/m) | 65 kHz(25 - 115 kHz) | 130 µm(125 - 135µm) | 32.5 µm(29.5 - 35.5µm) | 1 µm(0.5 - 1.5 µm) |
All typical values
HQ:NSC18/Hard/Al BS
Long Scanning, DLC Hardened Lift Mode and Soft Tapping Mode AFM Probe
AFM probes of the HQ:NSC18 series are suitable for soft tapping and Lift mode operation AFM (e.g. EFM and MFM) since they provide high stability in tapping mode as well as high sensitivity to magnetic and electric forces that may be weak. These AFM probes are also used for mapping of materials properties in Force modulation mode and true topography imaging of soft samples in Soft tapping mode.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilever. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilever by approximately 2.5 times.
Hard Diamond-Like-Carbon



AFM Probe Specifications
AFM Tip
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Rotated | 15 µm (12 - 18 µm) | 40° | < 20 nm |
AFM Cantilever
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever A | Beam | 2.8 N/m(1.2 - 5.5 N/m) | 75 kHz(60 - 90 kHz) | 225 µm(220 - 230µm) | 27.5 µm(24.5 - 30.5µm) | 3 µm(2.5 - 3.5 µm) |
All typical values
HQ:XSC11/Hard/Al BS
AFM Probe with 4 Different Long Scanning, DLC Hardened Cantilevers for Various Applications
AFM probes of the HQ:XSC11 series have four different AFM cantilevers, two on each side of the holder chip. They can be used in various applications.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilevers. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilevers by approximately 2.5 times.
Hard Diamond-Like-Carbon



AFM Probe Specifications
AFM Tip
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Rotated | 15 µm (12 - 18 µm) | 40° | < 20 nm |
AFM Cantilever
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever A | Beam | 0.2 N/m(0.1 - 0.4 N/m) | 15 kHz(12 - 18 kHz) | 500 µm(495 - 505µm) | 30 µm(27 - 33µm) | 2.7 µm(2.2 - 3.2 µm) |
| Cantilever B | Beam | 2.7 N/m(1.1 - 5.6 N/m) | 80 kHz(60 - 100 kHz) | 210 µm(205 - 215µm) | 30 µm(27 - 33µm) | 2.7 µm(2.2 - 3.2 µm) |
| Cantilever C | Beam | 7 N/m(3 - 16 N/m) | 155 kHz(115 - 200 kHz) | 150 µm(145 - 155µm) | 30 µm(27 - 33µm) | 2.7 µm(2.2 - 3.2 µm) |
| Cantilever D | Beam | 42 N/m(17 - 90 N/m) | 350 kHz(250 - 465 kHz) | 100 µm(95 - 105µm) | 50 µm(47 - 53µm) | 2.7 µm(2.2 - 3.2 µm) |
All typical values
HQ:CSC17/Hard/Al BS
Long Scanning, DLC Hardened Contact Mode AFM Probe
AFM probes of the HQ:CSC17 series have AFM cantilevers with low force constants that offer high sensitivity in contact mode AFM. These AFM probes are also used for Lateral Force Microscopy.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilever. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilever by approximately 2.5 times.
Hard Diamond-Like-Carbon



AFM Probe Specifications
AFM Tip
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Rotated | 15 µm (12 - 18 µm) | 40° | < 20 nm |
AFM Cantilever
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever A | Beam | 0.18 N/m(0.06 - 0.4 N/m) | 13 kHz(10 - 17 kHz) | 450 µm(445 - 455µm) | 50 µm(47 - 53µm) | 2 µm(1.5 - 2.5 µm) |
All typical values
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