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Bonded Targets
Bonded Targets
Some sputter coater models have the targets bonded to the target head with a conductive bonding material such as Silver Paint. In this case the target has to be removed from the target head, the surface needs to be cleaned and the new target can be easily bonded to the flat surface using silver paint. Exceptions are the Fullam Effa Coater and the Fullam EMS-76 Coater; they use Indium Bonded Targets, #29-49; see Technical Notes, Bonding of Sputter Targets on Fullam Sputter Coaters.
Documentation
Documentation
