Planotec 10µm Pitch Silicon Calibration Specimen

Useful for magnification calibration or image distortion check in SEM and LM.

Single crystal silicon, 5 x 5mm. The squares repeat every 10µm (0.01mm). The dividing lines are about 1.9µm wide, formed by electron beam lithography. A broader marking line is written every 500µm (0.5mm) which is useful for light microscopy. Lines are etched, and approximately 300nm deep. Available unmounted or mounted on SEM specimen mounts. See information on mounts A-R. A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.

Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.

Thickness: 675µm
Si crystal orientation: <100>
Wafer type: P-type/boron doped
Resistance: 1-30 Ohm/cm

To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the standard SEM pin mounts, the #16179 PELCO® SEM Sample Stub Vacuum Desiccator would be ideal.

PELCO® Technical Notes, Planotec Test Specimen (342KB PDF)

Planotec Silicon Test Specimens with calibration certificate for mounted test specimens only. The guaranteed accuracy is 1%. The basic reference specimen is calibrated by the National Physical Laboratory (counter part of NIST), of England, by laser beam interferometry. 

Sample Certification for Planotec Test Specimen (796KB PDF)