PELCO® LatticeAx® 420

The Ultimate High Accuracy Indent and Cleaving System

The PELCO® LatticeAx® 420 (formerly from LatticeGear™) provides the highest level of accuracy and performance in the PELCO® LatticeAx® Indent and Cleaving System model lineup. The PELCO® LatticeAx® 420 delivers our highest cleaving accuracy of 10μm in less than 5 minutes making it ideal for any lab that values speed and high accuracy while at the same time needing to accommodate a variety of sample sizes, thicknesses and material types. The patented PELCO® LatticeAx® base is integrated with a complete vision package that includes a monocular microscope with 4μm optical resolution, color CCD camera and real-time image acquisition and display software, and an X-Y stage. This dedicated cleaving workstation is designed so any trained user can easily survey, align, micro-indent, cleave, and inspect processed samples.

Diamond Indenter

Cleaved Semiconductor

Delidded MEMS Device

Features

• Ultra high accuracy positioning of target (±10µm)
• Focus mount with coarse and fine focus control
• Monocular, parfocal, zoom lens (0.58-7x mag) with color CCD camera
  (computer and monitor not included)
• Indent position control with 5µm step size
• Polished tip diamond indenter 5 minute process sample setup to cleave
• Simple to use, ergonomic design and small footprint
• Cleaves a wide range of materials and sample sizes
• Clock dial for indent depth calibration

Large Sample Platform for PELCO® LatticeAx®

The Large Sample Platform is a PELCO® LatticeAx® option that adds support for wafers and samples up to 300mm. It consists of a support system and an indenter extension. The five fingers support large samples while the extender puts the fine-positioning knob for the indenter within easy reach. The Large Sample Platform fits on all models of PELCO® LatticeAx® systems and is easy to install with a single set screw.