Autosamdri®-815B, Series B

• The Supercritical Autosamdri®-815B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
  
  
• Smooth operation and precise control are the Supercritical Autosamdri®-815B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 4" (100mm), 3" (75mm), 2" (50mm) wafers or 10mm square die per process run!

Features

• Microprocessor controller allows for complete automatic processing.*
• All internal surfaces are inert to CO2 and ultra pure alcohols.*
• Repeatable operating parameters insuring reproducibility of results.*
• Integrated temperature controls.*
• Internal rupture disc built in for safety. *
• Processes up to 5 x 4" (100mm) diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 3" (75mm), 5 x 2" (50mm) diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
• All electronic components meet CE, UL and/or U.S. Military Specifications.
• Static pressure control module pre-set for automatic safe pressure stability.
• 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
• Under-lit chamber with viewing window facilitates operator chamber status viewing.
• An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes and maintains temperature automatically during both FILL and PURGE modes.*
• LED's instantly indicate process mode at a glance.*
• Clean room static-free compatible design.
• For added safety and convenience, the U.S. Patented SOTER™ condenser* quietly captures exhaust and alcohols.
• Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.
  

Specifications

• Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
• System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth
• Chamber size: 4.50" I.D. x 1.25" depth Chamber volume: 326 ml
• Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
• 120V/50-60Hz (Other voltage units also available. Please Inquire)
• LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*
  

Standard Accessories

• LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~ 3m) long for clean room operation (at a nominal charge, other lengths available upon request).
• Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Autosamdri®-815B.
• New SOTER™ Condenser* connects to exhaust hose. Captures all alcohol and deadens exhaust noise.*
• Static free Exhaust Tubing for all exhaust outlets.
• Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
• Spare Chamber O-ring (3), Chamber Lamp (1), and 5A Slo-Blow Fuses (2).
• 3 Chamber Inserts.* Enables original chamber ID reduction down to smaller chamber ID sizes for a range including: 4", 3", 2", and 1.25" !
• 4" (100mm), 3" (75mm), 2" (50mm) diameter Wafer Holders and 10mm square Die Holder included. Holders are HF compatible and can hold up to 5 wafers or die each.
• Free lifetime technical support consultation by our scientific staff.
• 2 year warranty on all parts and labor.
  

Optional Accessories

• 8760-02: :KNURL NUT for 4" and 6" Process Chamber
• 8760-40: :5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
• 8770-10: :CHAMBER LAMP, 120Volt/60Hz
• 8770-32: :HIGH-PRESSURE HOSE, 5ft
• 8770-33: :HIGH-PRESSURE HOSE, 10ft
• 8770-60: :CHAMBER LID for 4" Process Chamber
• 8785: :Double T-Filter Assembly
• 8770-83B: :0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
• 8784-05: :Gasket for LCO2 Tank Connect
• 8770-51T/815B: :O-Ring for Autosamdri®-934 and Autosamdri®-815B
• 8770-46: :Flow Meter - Use with any 2.5", 3.4" and 4.0" dia. Autosamdri® Chamber (60 SCFH)
• 8770-53: :POWER CABLE
• 8770-54: :LCO₂ TANK SCALE W/ REMOTE DISPLAY
• 8770-56A: :Step-Down Transformer, 200-240V → 110-120V, 3000W
• 8770-83A: :Internal 0.5µm 316SS Particulate Line Filter
• 8768B: :4" - 100mm HF Compatible Wafer Holder
  Holds 5 Wafers
• 8768C: :3" - 75mm HF Compatible Wafer Holder
  Holds 5 Wafers
• 8768D: :2" - 50mm HF Compatible Wafer Holder
  Holds 5 Wafers
• 8768G: :1" - 25mm HF Compatible Wafer Holder
  Holds 5 Wafers
• 8768E: :10mm Square HF Compatible Chip Holder, Holds 5 Die
  

CPD MULTI-APPLICATIONS

• Bio-Engineering
• Botanical
• Entomology
• Gel
• Graphene
• MEMS
• Metal-Organic Frameworks
• Miscellaneous SEM CPD Apps
• Nanoscribe