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4 x 4mm die with 3 x 3mm grid with 1µm pitch X and Y mm scale fiducial finders Unique serial number |
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Close-up of major (1.0 and 0.5mm) and minor (0.1mm) fiducial marks |
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Close-up of 1µm pitch grid with 10µm and 100µm lines |
Enlarged view of grid pattern
SEM image of grid pattern
633-1 Sample Certificate of Traceability (157KB PDF)
633-11 Sample Certificate of Calibration (185KB PDF)