Details for Pelcotec™ G-1 Calibration Specimen

	4 x 4mm die with 3 x 3mm grid with 1µm pitch X and Y mm scale fiducial finders Unique serial number
	Close-up of major (1.0 and 0.5mm) and minor (0.1mm) fiducial marks
	Close-up of 1µm pitch grid with 10µm and 100µm lines

Enlarged view of grid pattern

SEM image of grid pattern

Country/region