{"product_id":"tgxyz-series","title":"TGXYZ Series","description":"\u003ch2 class=\"Polaris-Header-Title\" tabindex=\"-1\"\u003e\u003ca href=\"https:\/\/www.spmtips.com\/\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/MikroMasch-Logo.svg?v=1768988367\" alt=\"\"\u003e\u003c\/a\u003e\u003c\/h2\u003e\n\u003cp\u003e\u003ciframe width=\"1920\" height=\"1080\" src=\"https:\/\/www.youtube.com\/embed\/tiPCUIMgMTo\" title=\"MikroMasch TGXYZ Calibration Series\"\u003e\u003c\/iframe\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/SEM-image-of-a-TGXYZ-grating-20150520050511.png?v=1771147818\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cem\u003eSEM image of a TGXYZ grating\u003c\/em\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: left;\"\u003e\u003cspan\u003eCalibration gratings from the TGXYZ series are arrays of different structures comprising rectangular SiO2 steps on a Si wafer. The small square in the center with dimensions 500µm by 500µm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5µm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10µm.\u003c\/span\u003e\u003cbr\u003e\u003cbr\u003e\u003cspan\u003eThe step height value is calibrated over the whole active area. The actual step height, indicated on the individual unit label, may differ slightly from the nominal value.\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"row pb-3\"\u003e\n\u003cdiv class=\"col-8\"\u003e\n\u003cdiv class=\"col-6\"\u003e\n\u003cdiv class=\"scrollable-content\"\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOrder\u003cbr\u003eCode\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eStep\u003cbr\u003eHeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003eStep Height\u003c\/strong\u003e\u003cbr\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eArray\u003cbr\u003ePitch\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003e Pitch\u003c\/strong\u003e\u003cbr\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003eActive\u003c\/strong\u003e\u003cbr\u003e\u003cstrong\u003eArea \u003c\/strong\u003e\n\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eChip\u003cbr\u003eDimensions\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eTGXYZ01\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e20nm\u003c\/td\u003e\n\u003ctd\u003e5% of measured value\u003c\/td\u003e\n\u003ctd\u003e5 \u0026amp; 10µm\u003c\/td\u003e\n\u003ctd\u003e0.1µm\u003c\/td\u003e\n\u003ctd\u003e1×1mm\u003c\/td\u003e\n\u003ctd\u003e5×5×0.3mm*\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eTGXYZ02\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e100nm \u003c\/td\u003e\n\u003ctd\u003e3% of measured value\u003c\/td\u003e\n\u003ctd\u003e5 \u0026amp; 10µm\u003c\/td\u003e\n\u003ctd\u003e0.1µm\u003c\/td\u003e\n\u003ctd\u003e1×1mm \u003c\/td\u003e\n\u003ctd\u003e5×5×0.3mm*\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eTGXYZ03\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e500nm\u003c\/td\u003e\n\u003ctd\u003e3% of measured value\u003c\/td\u003e\n\u003ctd\u003e5 \u0026amp; 10µm\u003c\/td\u003e\n\u003ctd\u003e0.1µm\u003c\/td\u003e\n\u003ctd\u003e1×1mm\u003c\/td\u003e\n\u003ctd\u003e5×5×0.3mm*\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003cp\u003e*\u003cem\u003edimensions of silicon chip without the metal base plate\u003c\/em\u003e\u003c\/p\u003e\n\u003ch3\u003e\u003cspan style=\"color: rgb(255, 0, 255);\"\u003eApplication\u003c\/span\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cspan\u003eThe TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. One can compensate for vertical non-linearity by using several calibration gratings with different nominal step heights.\u003c\/span\u003e\u003cbr\u003e\u003cbr\u003e\u003cspan\u003eFor accurate quantification of images of calibration gratings from the TGXYZ series, one can use the calibration option in the Scanning Probe Image Processor (SPIP) designed by Image Metrology.\u003c\/span\u003e\u003c\/p\u003e\n\u003chr\u003e\n\u003chr\u003e\n\u003ch2 class=\"title title--sxl\"\u003e\u003cspan style=\"color: rgb(255, 128, 0);\"\u003eTGXYZ01 \u003c\/span\u003e\u003c\/h2\u003e\n\u003ch3 class=\"title title--xsm-secondary sbo-xxxs-constant\"\u003eAFM XYZ calibration grating, 20nm step height, 5µm and 10µm pitch arrays\u003c\/h3\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/SEM-image-of-a-TGXYZ-grating-20150520050511.png?v=1771147818\" alt=\"\"\u003e\u003c\/p\u003e\n\u003cp\u003eThe\u003cspan\u003e \u003c\/span\u003e\u003cstrong\u003eTGXYZ01\u003c\/strong\u003e\u003cspan\u003e \u003c\/span\u003eis an AFM calibration standard of the TGXYZ series that features:\u003cbr\u003e\u003cbr\u003e• 500×500µm square with 5µm pitch arrays pf circular pillars and holes, as well as lines in the X and Y direction\u003cbr\u003e• 1×1mm square with 10µm pitch arrays of square pillars and square holes\u003cbr\u003e• step height in the range of 20nm\u003c\/p\u003e\n\u003cp\u003eMikroMasch offers versions of the same calibration standard with 100nm step height (\u003cstrong\u003eTGXYZ02\u003c\/strong\u003e) and 500nm step height (\u003cstrong\u003eTGXYZ03\u003c\/strong\u003e).\u003c\/p\u003e\n\u003cp\u003eFor more detailed information on the TGXYZ series AFM calibration standards please check the\u003cspan\u003e \u003c\/span\u003e\u003cstrong\u003eTGXYZ General Description \u003c\/strong\u003e(above).\u003c\/p\u003e\n\u003chr\u003e\n\u003ch2 class=\"title title--sxl\"\u003e\u003cspan style=\"color: rgb(255, 128, 0);\"\u003eTGXYZ02\u003c\/span\u003e\u003c\/h2\u003e\n\u003ch3 class=\"title title--xsm-secondary sbo-xxxs-constant\"\u003eAFM XYZ calibration grating, 100nm step height, 5µm and 10µm pitch arrays\u003c\/h3\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/SEM-image-of-a-TGXYZ-grating-20150520050511.png?v=1771147818\" alt=\"\"\u003e \u003c\/p\u003e\n\u003cp\u003eThe\u003cspan\u003e \u003c\/span\u003e\u003cstrong\u003eTGXYZ02\u003c\/strong\u003e\u003cspan\u003e \u003c\/span\u003eis an AFM calibration standard of the TGXYZ series that features:\u003cbr\u003e\u003cbr\u003e• 500×500µm square with 5µm pitch arrays pf circular pillars and holes, as well as lines in the X and Y direction\u003cbr\u003e• 1×1mm square with 10µm pitch arrays of square pillars and square holes\u003cbr\u003e• step height in the range of 100nm\u003c\/p\u003e\n\u003cp\u003eMikroMasch offers versions of the same calibration standard with 20nm step height (\u003cstrong\u003eTGXYZ01\u003c\/strong\u003e) and 500nm step height (\u003cstrong\u003eTGXYZ03\u003c\/strong\u003e).\u003c\/p\u003e\n\u003cp\u003eFor more detailed information on the TGXYZ series AFM calibration standards please check the \u003cstrong\u003eTGXYZ General Description\u003c\/strong\u003e (above). \u003c\/p\u003e\n\u003chr\u003e\n\u003ch2 class=\"title title--sxl\"\u003e\u003cspan style=\"color: rgb(255, 128, 0);\"\u003eTGXYZ03\u003c\/span\u003e\u003c\/h2\u003e\n\u003ch3 class=\"title title--xsm-secondary sbo-xxxs-constant\"\u003eAFM XYZ calibration grating, 500nm step height, 5µm and 10µm pitch arrays\u003c\/h3\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/SEM-image-of-a-TGXYZ-grating-20150520050511.png?v=1771147818\" alt=\"\"\u003e\u003c\/p\u003e\n\u003cp\u003eThe\u003cspan\u003e \u003c\/span\u003e\u003cstrong\u003eTGXYZ03\u003c\/strong\u003e\u003cspan\u003e \u003c\/span\u003eis an AFM calibration standard of the TGXYZ series that features:\u003cbr\u003e\u003cbr\u003e• 500×500µm square with 5µm pitch arrays pf circular pillars and holes, as well as lines in the X and Y direction\u003cbr\u003e• 1×1mm square with 10µm pitch arrays of square pillars and square holes\u003cbr\u003e• step height in the range of 500nm\u003c\/p\u003e\n\u003cp\u003eMikroMasch offers versions of the same calibration standard with 20nm step height (\u003cstrong\u003eTGXYZ01\u003c\/strong\u003e) and 100nm step height (\u003cstrong\u003eTGXYZ02\u003c\/strong\u003e).\u003c\/p\u003e\n\u003cp\u003eFor more detailed information on the TGXYZ series AFM calibration standards please check the \u003cstrong\u003eTGXYZ General Description \u003c\/strong\u003e(above).\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e","brand":"MikroMasch","offers":[{"title":"TGXYZ01 Mounted on 12mm round metal plate (Unit: each)","offer_id":55984951361862,"sku":"TGXYZ01","price":1460.55,"currency_code":"RON","in_stock":true},{"title":"TGXYZ01 Unmounted (chip only, no plate) (Unit: each)","offer_id":55984958669126,"sku":"TGXYZ01\/NM","price":1460.55,"currency_code":"RON","in_stock":true},{"title":"TGXYZ02 Mounted on 12mm round metal plate (Unit: each)","offer_id":55984959619398,"sku":"TGXYZ02","price":1460.55,"currency_code":"RON","in_stock":true},{"title":"TGXYZ02 Unmounted (chip only, no plate) (Unit: each)","offer_id":55984959750470,"sku":"TGXYZ02\/NM","price":1460.55,"currency_code":"RON","in_stock":true},{"title":"TGXYZ03 Mounted on 12mm round metal plate (Unit: each)","offer_id":55984959848774,"sku":"TGXYZ03","price":1460.55,"currency_code":"RON","in_stock":true},{"title":"TGXYZ03 Unmounted (chip only, no plate) (Unit: each)","offer_id":55984960078150,"sku":"TGXYZ03\/NM","price":1460.55,"currency_code":"RON","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/SEM-image-of-a-TGXYZ-grating-20150520050511.png?v=1771147818","url":"https:\/\/allemee.com\/products\/tgxyz-series","provider":"AllEm","version":"1.0","type":"link"}