{"product_id":"tgx-series","title":"TGX Series","description":"\u003ch2 class=\"Polaris-Header-Title\" tabindex=\"-1\"\u003e\u003ca href=\"https:\/\/www.spmtips.com\/\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/MikroMasch-Logo.svg?v=1768988367\"\u003e\u003c\/a\u003e\u003c\/h2\u003e\n\u003ch2 class=\"title title--xsm-secondary sbo-xxxs-constant\"\u003e\u003cspan style=\"color: rgb(0, 170, 255);\"\u003eAFM grating with undercut-edge structures anisotropically etched in silicon\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp\u003e\u003ciframe title=\"MikroMasch TGX Series Calibration Standards\" src=\"https:\/\/www.youtube.com\/embed\/Uk4rBbqr_10\" height=\"1080\" width=\"1920\"\u003e\u003c\/iframe\u003e\u003c\/p\u003e\n\u003cdiv class=\"row pb-3\"\u003e\n\u003cdiv class=\"col-8\"\u003e\n\u003cdiv class=\"col-6\"\u003e\n\u003cp\u003e\u003cspan\u003eThe silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by anisotropic etching along the (111) crystallographic planes of silicon. The typical radius of the edges is less than 5nm.\u003c\/span\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cspan\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/tgx-20121126031137.jpg?v=1771147051\" alt=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cem\u003eSEM image of a TGX grating\u003c\/em\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cspan\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/Edit-SEM-image-of-the-TGX-surface-structures-20130121110114.jpg?v=1771147101\" alt=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cem\u003eSEM image of the TGX surface structures\u003c\/em\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cspan\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/Schematic-of-the-TGX-grating-structures-20121030111018.jpg?v=1771147133\" alt=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cspan\u003e \u003cem\u003eSchematic of the TGX grating structures\u003c\/em\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"scrollable-content\"\u003e\n\u003ctable width=\"655\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003ePart number\u003c\/td\u003e\n\u003ctd\u003ePitch\u003c\/td\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003eEdge radii\u003c\/td\u003e\n\u003ctd\u003eStep height\u003c\/td\u003e\n\u003ctd\u003eActive area\u003c\/td\u003e\n\u003ctd\u003eChip dimensions\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTGX\u003c\/td\u003e\n\u003ctd\u003e3µm\u003c\/td\u003e\n\u003ctd\u003e0.1µm\u003c\/td\u003e\n\u003ctd\u003e\u0026lt;5nm\u003c\/td\u003e\n\u003ctd\u003e1µm*\u003c\/td\u003e\n\u003ctd\u003e1×1mm\u003c\/td\u003e\n\u003ctd\u003e5×5×0.3mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003cp\u003e\u003cem\u003e\u003cspan\u003e* \u003c\/span\u003e\u003cspan\u003eApproximate value, not for vertical calibration purposes\u003c\/span\u003e\u003c\/em\u003e\u003c\/p\u003e\n\u003ch3\u003e\u003cspan style=\"color: rgb(255, 0, 255);\"\u003eApplication\u003c\/span\u003e\u003c\/h3\u003e\n\u003cp\u003eThe TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003edetection of lateral non-linearity, hysteresis, creep, and cross-coupling effects\u003c\/li\u003e\n\u003cli\u003edetermination of the tip aspect ratio\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eFor accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology. \u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e","brand":"MikroMasch","offers":[{"title":"TGX Mounted on 12mm round metal plate (Unit: each)","offer_id":56075219239238,"sku":"TGX","price":1460.55,"currency_code":"RON","in_stock":true},{"title":"TGX Unmounted (chip only, no plate) (Unit: each)","offer_id":56075219272006,"sku":"TGX\/NM","price":1460.55,"currency_code":"RON","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/tgx-20121126031137.jpg?v=1771147051","url":"https:\/\/allemee.com\/products\/tgx-series","provider":"AllEm","version":"1.0","type":"link"}