{"product_id":"tgf11-series","title":"TGF11 Series","description":"\u003ch2 class=\"Polaris-Header-Title\" tabindex=\"-1\"\u003e\u003ca href=\"https:\/\/www.spmtips.com\/\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/MikroMasch-Logo.svg?v=1768988367\" alt=\"\"\u003e\u003c\/a\u003e\u003c\/h2\u003e\n\u003ch2\u003e\u003cspan style=\"color: rgb(0, 170, 255);\"\u003eAFM grating with trapezoid structures anisotropically etched in silicon\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp\u003e\u003ciframe width=\"1920\" height=\"1080\" src=\"https:\/\/www.youtube.com\/embed\/hifcvyQaMAE\" title=\"MikroMasch TGF11 Series Calibration Standards\"\u003e\u003c\/iframe\u003e\u003c\/p\u003e\n\u003cdiv class=\"row pb-3\"\u003e\n\u003cdiv class=\"col-8\"\u003e\n\u003cdiv class=\"col-6\"\u003e\n\u003cp\u003e\u003cspan\u003eThe TGF calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate. The sidewalls of the structures are very smooth and planar surfaces with well-defined orientation formed by the (111) crystallographic planes in monocrystalline silicon. The sidewalls and the horizontal top surfaces form an angle of 54.74°.\u003c\/span\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cspan\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/SEM-image-of-a-TGF-grating-20150520050538.png?v=1771148897\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cem\u003eSEM image of a TGF 11 grating\u003c\/em\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cspan\u003e\u003cimg height=\"227\" width=\"416\" alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/265e8fcc7d3783587906e904dad1658d3650ae4c.png?v=1771148925\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cem\u003eSchematic of the TGF 11 grating\u003c\/em\u003e\u003c\/p\u003e\n\u003cdiv class=\"scrollable-content\"\u003e\n\u003ctable width=\"555\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003ePart number\u003c\/td\u003e\n\u003ctd\u003ePitch\u003c\/td\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003eEdge angle\u003c\/td\u003e\n\u003ctd\u003eActive area\u003c\/td\u003e\n\u003ctd\u003eStep height\u003c\/td\u003e\n\u003ctd\u003eChip dimensions\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTGF11\u003c\/td\u003e\n\u003ctd\u003e10µm\u003c\/td\u003e\n\u003ctd\u003e0.1µm\u003c\/td\u003e\n\u003ctd\u003e54.74°\u003c\/td\u003e\n\u003ctd\u003e3×3mm\u003c\/td\u003e\n\u003ctd\u003e1.75µm*\u003c\/td\u003e\n\u003ctd\u003e5×5×0.3mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003cp\u003e\u003cem\u003e \u003cspan\u003e* Approximate value, not for vertical calibration purposes\u003c\/span\u003e\u003c\/em\u003e\u003c\/p\u003e\n\u003ch3\u003e\u003cspan style=\"color: rgb(255, 0, 255);\"\u003eApplication\u003c\/span\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cspan\u003eTGF11 grating can be used for the assessment of scanner nonlinearity in the vertical direction. Direct calibration of the lateral force can be obtained by analyzing the contact response measured on the flat and sloped facets. This can be done for the calibration of conventional Si probes or cantilevers with an attached colloidal particle with any radius of curvature up to 2μm.\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e","brand":"MikroMasch","offers":[{"title":"TGF11 Mounted on 12mm round metal plate (Unit: each)","offer_id":55984960799046,"sku":"TGF11","price":1460.55,"currency_code":"RON","in_stock":true},{"title":"TGF11 Unmounted (chip only, no plate) (Unit: each)","offer_id":55984968532294,"sku":"TGF11\/NM","price":1460.55,"currency_code":"RON","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/SEM-image-of-a-TGF-grating-20150520050538.png?v=1771148898","url":"https:\/\/allemee.com\/products\/tgf11-series","provider":"AllEm","version":"1.0","type":"link"}