{"product_id":"clean-room-packed-ultra-flat-silicon-wafers","title":"Clean Room Packed Ultra-Flat Silicon Wafers","description":"\u003cp class=\"Polaris-Header-Title\" tabindex=\"-1\"\u003e\u003cspan\u003e\u003cstrong\u003e\u003cspan class=\"Polaris-Text--root Polaris-Text--headingLg Polaris-Text--bold\"\u003e\u003cimg height=\"37\" width=\"206\" alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/RegularBlueLogo_3583c6ee-e99c-408f-b69b-099430888259.jpg?v=1774423825\"\u003e    \u003c\/span\u003e\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch2\u003e\u003cspan style=\"color: rgb(0, 170, 255);\"\u003eUltra-Flat 4\" Silicon Wafers\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21610-6_c7d1b628-242d-42a7-bed5-ee239b569ca3.jpg?v=1778422641\" alt=\"\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cstrong\u003e21610-4\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003eUltra-Flat 4\" Silicon Wafer\u003c\/p\u003e\n\u003cp\u003eUltra-Flat 4\" Silicon Wafer for demanding substrate studies. Can also be used as substrate for AFM or SEM samples by dicing the wafer into smaller pieces using a Scriber and the Wafer Cleaving \/ Glass Breaking Pliers. The 4\" ultra-flat silicon wafer is shipped in a  4\" Wafer Carrier.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eProperties for 4\" (100mm) Ultra-Flat Wafer:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eOrientation: \u0026lt;100\u0026gt;\u003cbr\u003eType\/Dopant: P\/Boron\u003cbr\u003eGrade: Prime \/ CZ Virgin\u003cbr\u003eResistivity: 10-20 Ohm-cm\u003cbr\u003eThickness: 525µm +\/- 20µm\u003cbr\u003eTTV: \u0026lt;4.00µm\u003cbr\u003eSFPD: \u0026lt;2.0µm\u003cbr\u003eWarp: ≤30µm\u003cbr\u003eBow: ≤20µm\u003cbr\u003eParticles: ≤20@≥0.3µm\u003cbr\u003eFront Surface: Polished\u003cbr\u003eBack Surface: Etched\u003cbr\u003eFlat: 2 per SEMI Standard\u003cbr\u003eSite Flatness: \u0026lt;2.0µm\u003cbr\u003eRoughness: Typically 2-3Å\u003c\/p\u003e\n\u003chr\u003e\u003chr\u003e\n\u003ch2\u003e\u003cspan style=\"color: rgb(0, 170, 255);\"\u003eUltra-Flat 6\" Silicon Wafers\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21610-6_f6e5ac17-f388-4f31-b9b1-d0c723433cab.jpg?v=1778423025\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cstrong\u003e21610-6\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003eUltra-Flat 6\" Silicon Wafer\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21062-25_e4987d8b-b3fb-44fa-a070-d60ccb22c9fe.jpg?v=1778423092\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cstrong\u003e21610-55, 21610-57, 21610-510\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e5 x 5mm, 5 x 7mm, 10 x 10mm stealth-diced\u003cbr\u003eUltra-Flat Wafers\u003c\/p\u003e\n\u003cp\u003eUltra-Flat 6\" diameter Silicon Wafer for demanding substrate studies. The 6\" ultra-flat silicon wafer is shipped in a 6\" Wafer Carrier.\u003c\/p\u003e\n\u003cp\u003eAlso available as 5 x 5mm, 5 x 7mm, 10 x10mm stealth-diced dies in Gel-Pak® boxes. Stealth dicing eliminates edge-chipping and cutting debris associated with saw dicing, providing the cleanest, most uniform product possible. All products are packed in class 10 clean room conditions.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eProperties for 6\" (150mm) Ultra-Flat Wafer:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eMaterial: CZ Virgin Silicon Wafer\u003cbr\u003eGrade: Prime\u003cbr\u003eDiameter: 150mm\u003cbr\u003eOrientation: \u0026lt;100\u0026gt;\u003cbr\u003eType\/Dopant: P\/Boron\u003cbr\u003eResistivity: 10-20 ohm-cm\u003cbr\u003eThickness: 675µm +\/- 20µm\u003cbr\u003eTTV: ≤2µm\u003cbr\u003eSite Flatness: \u0026lt;=1µm\u003cbr\u003eWarp: ≤30µm\u003cbr\u003eBow: ≤20µm\u003cbr\u003eParticles: ≤30@≥0.2µm\u003cbr\u003eFront Surface: Polished\u003cbr\u003eBack Surface: Etched\u003cbr\u003eFlat: 1 per SEMI Standard\u003c\/p\u003e\n\u003chr\u003e\u003chr\u003e\n\u003ch2\u003e\u003cspan style=\"color: rgb(0, 170, 255);\"\u003eUltra-Flat SiO2 Substrates\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21610-6_f6e5ac17-f388-4f31-b9b1-d0c723433cab.jpg?v=1778423025\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cstrong\u003e21620-6\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003eUltra-Flat 6\" Silicon Wafer\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21062-25_e4987d8b-b3fb-44fa-a070-d60ccb22c9fe.jpg?v=1778423092\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cstrong\u003e21620-55, 21620-57, 21620-510\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e5 x 5mm, 5 x 7mm, 10 x 10mm stealth-diced\u003cbr\u003eUltra-Flat Thermal SiO2 Wafers\u003c\/p\u003e\n\u003cp\u003eThe Ultra-Flat SiO2 substrates consist of a 200nm thermally grown amorphous SiO2 film on an ultra-flat silicon wafer. SiO2 is one of the most characterized materials and is widely used in semiconductor manufacturing, thin film research and as substrate for growing cells. It can be directly used as substrate for AFM and SEM imaging. The ultra-flat thermal silicon dioxide substrates are available in 6\" wafer and conveniently diced 5 x 5mm, 5 x 7mm and 10 x 10mm chips. The 6\" wafer is shipped in a 6\" Wafer Carrier, the diced pieces are shipped in a Gel-Pak® box.\u003c\/p\u003e\n\u003cp\u003eThe special clean dicing process involves coating the wafer with photo resist before dicing and removing it after dicing which produces debris-free SiO2 substrates. All products are packed in class 10 clean room conditions.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eProperties for thermal SiO2 substrates:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eMaterial: CZ Virgin Silicon Wafer\u003cbr\u003eGrade: Prime\u003cbr\u003eDiameter: 150mm\u003cbr\u003eOrientation: \u0026lt;100\u0026gt;\u003cbr\u003eType\/Dopant: P\/Boron\u003cbr\u003eResistivity: 10-20 Ohm-cm\u003cbr\u003eThickness: 675 +\/- 25µm\u003cbr\u003eTTV: ≤2µm\u003cbr\u003eSite Flatness: ≤1µm\u003cbr\u003eWarp: ≤30µm\u003cbr\u003eBow: ≤20µm\u003cbr\u003eParticles: ≤20@≥0.2µm\u003cbr\u003eFront Surface: Polished\u003cbr\u003eBack Surface: Etched\u003cbr\u003eFlat: 1 per SEMI Standard\u003cbr\u003e2000A +\/- 5% Thermal Oxide\u003c\/p\u003e\n\u003chr\u003e\u003chr\u003e\n\u003ch2\u003e\u003cspan style=\"color: rgb(0, 170, 255);\"\u003eUltra-Flat SiNx Coated Substrates\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg alt=\"\" src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21610-6.jpg?v=1741247672\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cstrong\u003e21630-6\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003eUltra-Flat SiNx Coated Wafer\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21062-25_e11a0e8d-90b7-4ee7-90c7-e20309fb4c39.jpg?v=1741247719\" alt=\"\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cstrong\u003e21630-55, 21630-57, 21630-510\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e5 x 5mm Diced Ultra-Flat SiNx on Silicon Substrates\u003c\/p\u003e\n\u003cp style=\"text-align: left;\"\u003e\u003ca id=\"_21630-55\" name=\"_21630-55\"\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003eThe Ultra-Flat SiNx\u003cspan\u003e\u003c\/span\u003e\u003cspan\u003e \u003c\/span\u003eSubstrates consist of ultra-flat silicon wafers coated with 200nm of amorphous nonstoichiometric ultra low-stress silicon nitride, similar to our\u003cspan\u003e \u003c\/span\u003esilicon nitride grids. The ultra-flat SiNx substrates are available in 6\" wafer and conveniently diced 5 x 5mm, 5 x 7mm and 10 x 10mm chips. The 6\" wafer is shipped in a 6\" wafer carrier; the diced pieces are shipped in a Gel-Pak\u003csup\u003e\u003cspan\u003e®\u003c\/span\u003e\u003c\/sup\u003e\u003cspan\u003e \u003c\/span\u003eBox.\u003c\/p\u003e\n\u003cp\u003eThe wafers are stealth diced, a special clean dicing process which produces debris-free substrates. All products are packed in class 10 clean room conditions.\u003c\/p\u003e\n\u003cp\u003eProperties for thermal SiNx substrates:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eMaterial: CZ Virgin Silicon\u003c\/li\u003e\n\u003cli\u003eWafer Grade: Prime\u003c\/li\u003e\n\u003cli\u003eDiameter: 150mm\u003c\/li\u003e\n\u003cli\u003eOrientation: \u0026lt;100\u0026gt;\u003c\/li\u003e\n\u003cli\u003eType\/Dopant: P\/Boron\u003c\/li\u003e\n\u003cli\u003eResistivity: 10-20 Ohm-cm\u003c\/li\u003e\n\u003cli\u003eThickness: 675 +\/- 25µm\u003c\/li\u003e\n\u003cli\u003eTTV: ≤2µm\u003c\/li\u003e\n\u003cli\u003eSite Flatness: ≤1µm\u003c\/li\u003e\n\u003cli\u003eWarp: ≤30µm\u003c\/li\u003e\n\u003cli\u003eBow: ≤20µm\u003c\/li\u003e\n\u003cli\u003eFront Surface: Polished\u003c\/li\u003e\n\u003cli\u003eBack Surface: Etched\u003c\/li\u003e\n\u003cli\u003eFlat: 1 per SEMI Standard\u003c\/li\u003e\n\u003cli\u003e2000A +\/- 100A SiNx\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003chr\u003e\u003chr\u003e\n\u003ch2\u003e\u003cspan style=\"color: rgb(0, 170, 255);\"\u003eSilocon Nitride Coated3mm Discs (blanks)\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21555-10_b8305193-9e36-4474-822f-c237ff6ab5e7.jpg?v=1741246829\" alt=\"\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cstrong\u003e21555-10\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cspan\u003eSilicon Nitride Blank\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003eThese 3mm Silicon Discs have an ultra-flat (Ra 0.45 ± 0.2nm) 50nm ultra-low-stress Silicon Nitride layer on both sides. Also available with a hydrophilic or hydrophobic surface coating or just as a silicon disk. The disks are made with the same state-of-the-art manufacturing techniques as the PELCO\u003cspan\u003e\u003csup\u003e® \u003c\/sup\u003e\u003c\/span\u003eSilicon Nitride Support Films. The disks are perfectly round and have the Easygrip™ edge for easy handling. Clean surface, no broken edges and free of debris often associated with other manufacturing processes. The ultra-low-stress film is nonstoichiometric and closer to SiN than Si\u003cspan\u003e3\u003c\/span\u003eN\u003cspan\u003e4\u003c\/span\u003e. They can be used for a number of applications:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eSpecimen mounts for SEM and FESEM applications\u003c\/li\u003e\n\u003cli\u003eSpecimen discs for AFM applications\u003c\/li\u003e\n\u003cli\u003eBlanks to build the\u003cspan\u003e \u003c\/span\u003ePELCO® Liquid Cell™\u003cspan\u003e \u003c\/span\u003etogether with the PELCO\u003cspan\u003e\u003csup\u003e®\u003c\/sup\u003e\u003c\/span\u003e\u003cspan\u003e \u003c\/span\u003eSilicon Nitride Membrane\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp style=\"text-align: left;\"\u003e\u003cspan\u003e\u003cb\u003eProduct Specifications\u003c\/b\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cb\u003eFilm Thickness\u003c\/b\u003e: 50nm ultra-low-stress Silicon Nitride on both sides\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHydrophilic:\u003c\/strong\u003e\u003cspan\u003e \u003c\/span\u003e5nm atomic layer-deposited hydroxylated alumina on 50nm ultra-low-stress silicon nitride.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHydrophobic:\u003c\/strong\u003e\u003cspan\u003e \u003c\/span\u003e5nm atomic layer-deposited alumina and fluoro-methylsilane on ultra-low-stress silicon nitride.\u003c\/li\u003e\n\u003cli\u003e\n\u003cb\u003eDisk Thickness\u003c\/b\u003e: 200µm silicon support\u003c\/li\u003e\n\u003cli\u003e\n\u003cb\u003eDisk Diameter\u003c\/b\u003e: 3mm\u003c\/li\u003e\n\u003cli\u003e\n\u003cb\u003eSurface Roughness\u003c\/b\u003e: The RMS (Rq) is 0.65 +\/- 0.06nm which gives a mean roughness (Ra) of 0.45 +\/- 0.02nm\u003c\/li\u003e\n\u003cli\u003e\n\u003cb\u003ePackaging\u003c\/b\u003e: The PELCO\u003cspan\u003e\u003csup\u003e®\u003c\/sup\u003e\u003c\/span\u003e\u003cspan\u003e \u003c\/span\u003eSilicon Nitride Discs with hydrophilic or hydrophobic coating are packaged under cleanroom conditions. The discs are packed in a vial holding 10 discs.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003ca title=\"This link will open a PDF file in a new window\" href=\"https:\/\/www.tedpella.com\/msds_html\/21500-10_to_21525-100_21535_21540-10_to_21542-10_21555_MSDS.pdf\"\u003eSDS (367KB PDF)\u003c\/a\u003e\u003c\/p\u003e","brand":"Ted Pella Inc.","offers":[{"title":"Ø4\" Ultra-Flat Silicon Wafer, Type \u003c100\u003e (Unit: each)","offer_id":56544897630534,"sku":"21610-4","price":594.06,"currency_code":"RON","in_stock":true},{"title":"Ø6\" Ultra-Flat Silicon Wafer, Type \u003c100\u003e (Unit: each)","offer_id":56545664270662,"sku":"21610-6","price":654.09,"currency_code":"RON","in_stock":true},{"title":"5 x 5mm stealth-diced Ultra-Flat Wafer, Type \u003c100\u003e, in a Gel-Pak® box, pkg\/25 (Unit: each)","offer_id":56545701790022,"sku":"21610-55","price":887.78,"currency_code":"RON","in_stock":true},{"title":"5 x 7mm stealth-diced Ultra-Flat Wafer, Type \u003c100\u003e, in a Gel-Pak® box, pkg\/18 (Unit: each)","offer_id":56545718108486,"sku":"21610-57","price":887.78,"currency_code":"RON","in_stock":true},{"title":"10 x 10mm stealth-diced Ultra-Flat Wafer, Type \u003c100\u003e, in a Gel-Pak® box, pkg\/6 (Unit: each)","offer_id":56545743405382,"sku":"21610-510","price":887.78,"currency_code":"RON","in_stock":true},{"title":"200nm Thermal Oxide on ø6\" Ultra-Flat Wafer, Type \u003c100\u003e, in 6\" wafer carrier (Unit: each)","offer_id":56545806778694,"sku":"21620-6","price":1252.22,"currency_code":"RON","in_stock":true},{"title":"200nm Thermal Oxide on 5 x 5mm diced Ultra-Flat Wafer, Type \u003c100\u003e, in Gel-Pak® box, pkg\/25 (Unit: each)","offer_id":56545814315334,"sku":"21620-55","price":986.33,"currency_code":"RON","in_stock":true},{"title":"200nm Thermal Oxide on 5 x 7mm diced Ultra-Flat Wafer, Type \u003c100\u003e, in Gel-Pak® box, pkg\/18 (Unit: each)","offer_id":56545814511942,"sku":"21620-57","price":1064.97,"currency_code":"RON","in_stock":true},{"title":"200nm Thermal Oxide on 10 x 10mm diced Ultra-Flat Wafer, Type \u003c100\u003e, in Gel-Pak® box, pkg\/6 (Unit: each)","offer_id":56545817297222,"sku":"21620-510","price":986.33,"currency_code":"RON","in_stock":true},{"title":"200nm SiNx on Ultra-Flat Silicon Wafer, in 6\" wafer carrier (Unit: each)","offer_id":56545869398342,"sku":"21630-6","price":2615.86,"currency_code":"RON","in_stock":true},{"title":"200nm SiNx on Ultra-Flat Silicon Wafer, 5 x 5mm pieces in a Gel-Pak® box (Unit: box\/25)","offer_id":56545901773126,"sku":"21630-55","price":1381.87,"currency_code":"RON","in_stock":true},{"title":"200nm SiNx on Ultra-Flat Silicon Wafer, 5 x 7mm pieces in a Gel-Pak® box (Unit: box\/18)","offer_id":56545930477894,"sku":"21630-57","price":1381.87,"currency_code":"RON","in_stock":true},{"title":"200nm SiNx on Ultra-Flat Silicon Wafer, 10 x 10mm pieces in a Gel-Pak® box (Unit: box\/6)","offer_id":56545955676486,"sku":"21630-510","price":1381.87,"currency_code":"RON","in_stock":true},{"title":"PELCO® Silicon Nitride Coated Discs, Ø3mm (Unit: pkg\/10)","offer_id":56546033533254,"sku":"21555-10","price":767.73,"currency_code":"RON","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/21610-6_c7d1b628-242d-42a7-bed5-ee239b569ca3.jpg?v=1778422641","url":"https:\/\/allemee.com\/products\/clean-room-packed-ultra-flat-silicon-wafers","provider":"AllEm","version":"1.0","type":"link"}