{"product_id":"automegasamdri®-936","title":"Automegasamdri®-936","description":"\u003cp\u003e\u003cimg src=\"https:\/\/tousimis.com\/img\/components\/tousimis-logo.jpg\" alt=\"tousimis Logo\" width=\"204\" height=\"49\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/8788B-01.jpg?v=1790150456\" alt=\"\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/8788B-02.jpg?v=1790150483\" alt=\"\"\u003e\u003c\/p\u003e\n\u003cp style=\"text-align: center;\"\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/8788B-03.jpg?v=1790150532\" alt=\"\"\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli style=\"list-style-type: none;\"\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eThe New Supercritical Automegasamdri®-936 System was developed by our in-house design team whose goal was to listen to and incorporate your needs into our next generation.\u003c\/p\u003e\n\u003cp\u003eThe classic features you have come to expect for decades that enable smooth operation, precise control and reproducibility are again evident in our most current design!\u003c\/p\u003e\n\u003cdiv\u003e\n\u003cul class=\"circle_list\"\u003e\n\u003cli\u003eProcess up to Five 6\" (150mm) Wafers per Process Run\u003c\/li\u003e\n\u003cli\u003eTouchscreen Programmable Interface\u003c\/li\u003e\n\u003cli\u003eFirst Time Ever...Previous Run Data Review\u003c\/li\u003e\n\u003cli\u003eIntegrated Chiller Loop Decreases LCO2 Consumption\u003c\/li\u003e\n\u003cli\u003eEasy Facilitation with Small Foot Print Design\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cstrong\u003e\u003ca href=\"\/pages\/8788b?_pos=1\u0026amp;_psq=8788B\u0026amp;_psid=8ec055ab9\u0026amp;_ss=e\"\u003etousimis catalog# 8788B\u003c\/a\u003e\u003c\/strong\u003e\n\u003c\/div\u003e\n\u003cdiv\u003e\u003cbr\u003e\u003c\/div\u003e\n\u003ch3 style=\"text-align: left;\"\u003e\u003cspan\u003eFeatures\u003c\/span\u003e\u003c\/h3\u003e\n\u003cul class=\"circle_list\"\u003e\n\u003cli\u003eA dedicated initial Slow Fill into the process chamber allows ideal fluid dynamics preserving the most sensitive micro devices.\u003c\/li\u003e\n\u003cli\u003eMaintenance made easy via accessible components including the external Post-Purge-Filter assembly.\u003c\/li\u003e\n\u003cli\u003ePatent Pending \"Vortex Swirl\": Non-mechanical stirring chamber allowing for fluid dynamic exchange without the need for particle generating friction causing devices.\u003c\/li\u003e\n\u003cli\u003eExtremely Efficient integrated Closed Cooling Loop dropping chamber temperature quickly for shorter process run times.\u003c\/li\u003e\n\u003cli\u003eThe internal SOTER(tm) condenser quietly captures and separates CO2 exhaust and waste alcohols.\u003c\/li\u003e\n\u003cli\u003eOur original Chamber Inserts enable chamber I.D. variance of chamber I.D. maximizing efficiency in LCO2 consumption, process time, and providing multiple size wafer process capability!\u003c\/li\u003e\n\u003cli\u003eProcess chamber LCO2 filtration down to 0.08µm with 99.999%+ particle retention.\u003c\/li\u003e\n\u003cli\u003eProcesses up to five 6\" (150mm) wafers each run. Included are the following HF Compatible Wafer Holders: 6\" (150mm), 4\" (100mm), 3\"(75mm), 2\" (50mm) and 10mm Die Holders.\u003c\/li\u003e\n\u003cli\u003eChamber Illumination via viewing window facilitates chamber status visualization.\u003c\/li\u003e\n\u003cli\u003eAutomatic process with factory default recipe or the ability to customize your own!\u003c\/li\u003e\n\u003cli\u003eAll internal surfaces are inert to CO2 and ultrapure alcohols.\u003c\/li\u003e\n\u003cli\u003eRepeatable operating parameters insuring \"reproducibility\" of results.\u003c\/li\u003e\n\u003cli\u003eSafety operation features integrated into both temperature and pressure automatic regulation.\u003c\/li\u003e\n\u003cli\u003eAll electronic components meet CE, UL and\/or U.S. Military Specifications.\u003c\/li\u003e\n\u003cli\u003eClean room static-free compatible design.\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003eSpecifications\u003c\/h3\u003e\n\u003cul class=\"circle_list\"\u003e\n\u003cli\u003eCabinet: 19.8\" (50.3cm) Width x 31.7\" (80.6cm) Depth x 44.5\" (113.0cm) Height\u003c\/li\u003e\n\u003cli\u003eSystem Set-Up Area Footprint: 27\" (68.6cm) Width x 38\" (96.5cm) Depth\u003c\/li\u003e\n\u003cli\u003eChamber size: 6.50\" I.D. x 1.25\" Depth \/ Chamber volume: 679 ml\u003c\/li\u003e\n\u003cli\u003e120V or 220V \/ 50-60Hz\u003c\/li\u003e\n\u003cli\u003eLCO2 flow is precisely controlled through Micro Metering Valves with Vernier handles for adjustment ease.\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003eStandard Accessories\u003c\/h3\u003e\n\u003cul class=\"circle_list\"\u003e\n\u003cli\u003eHigh Pressure LCO2 flexi-SS316 Braided line for safe operation and easy installation 10ft\/3m length included with system (Other lengths available upon request up to 100 ft\/30m).\u003c\/li\u003e\n\u003cli\u003eDouble T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose.\u003c\/li\u003e\n\u003cli\u003eStatic free exhaust tubing included for all exhaust ports.\u003c\/li\u003e\n\u003cli\u003eSpare chamber O-rings (3), chamber lamp (1), and slo-blow fuses (2x3A and 2x8A).\u003c\/li\u003e\n\u003cli\u003eChamber Inserts included: 6\" to 4\" \/ 4\" to 3\" \/ 3\" to 2\" \/ 2\" to 1.25\" ! Allows for multiple wafer size drying.\u003c\/li\u003e\n\u003cli\u003eHF compatible wafer holders included: 6\" (150mm), 4\" (100mm), 3\" (75mm), 2\" (50mm) and 10mm square die. Each holder can load up to five substrates each.\u003c\/li\u003e\n\u003cli\u003e2 year warranty on all parts and labor.\u003c\/li\u003e\n\u003cli\u003eFree lifetime technical support.\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003eOptional Accessories\u003c\/h3\u003e\n\u003cul class=\"circle_list\"\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8760-02\" target=\"_blank\"\u003e8760-02:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:KNURL NUT for 4\" and 6\" Process Chamber\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8760-41\" target=\"_blank\"\u003e8760-41:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:3 AMP FUSE for Autosamdri®, Automegasamdri® and Touchscreen Series C\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8760-42\" target=\"_blank\"\u003e8760-42:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:8 AMP FUSE for Autosamdri®, Automegasamdri® and Touchscreen Series C\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8770-13\" target=\"_blank\"\u003e8770-13:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:LED CHAMBER LAMP, 120V\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8770-32\" target=\"_blank\"\u003e8770-32:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:HIGH-PRESSURE HOSE, 5ft\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8770-33\" target=\"_blank\"\u003e8770-33:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:HIGH-PRESSURE HOSE, 10ft\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8770-70\" target=\"_blank\"\u003e8770-70:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:CHAMBER LID for 6\" Process Chamber\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8785\" target=\"_blank\"\u003e8785:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:Double T-Filter Assembly\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8770-83B\" target=\"_blank\"\u003e8770-83B:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8784-05\" target=\"_blank\"\u003e8784-05:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:Gasket for LCO2 Tank Connect\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8770-51T\/915B\" target=\"_blank\"\u003e8770-51T\/915B:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:O-Ring for Automegasamdri®-936 and Automegasamdri®-915B\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8770-47\" target=\"_blank\"\u003e8770-47:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:Flow Meter - Use with Automegasamdri®-936 and Automegasamdri®-915B (100 SCFH)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8770-54\" target=\"_blank\"\u003e8770-54:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:LCO\u003csub\u003e2\u003c\/sub\u003e\u003cspan\u003e \u003c\/span\u003eTANK SCALE W\/ REMOTE DISPLAY\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8768A\" target=\"_blank\"\u003e8768A:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:6\" - 150mm HF Compatible Wafer Holder\u003cbr\u003eHolds 5 Wafers\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8768F\" target=\"_blank\"\u003e8768F:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:5\" - 125mm HF Compatible Wafer Holder\u003cbr\u003eHolds 5 Wafers\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8768B\" target=\"_blank\"\u003e8768B:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:4\" - 100mm HF Compatible Wafer Holder\u003cbr\u003eHolds 5 Wafers\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8768C\" target=\"_blank\"\u003e8768C:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:3\" - 75mm HF Compatible Wafer Holder\u003cbr\u003eHolds 5 Wafers\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8768D\" target=\"_blank\"\u003e8768D:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:2\" - 50mm HF Compatible Wafer Holder\u003cbr\u003eHolds 5 Wafers\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8768G\" target=\"_blank\"\u003e8768G:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:1\" - 25mm HF Compatible Wafer Holder\u003cbr\u003eHolds 5 Wafers\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e\u003ca href=\"https:\/\/tousimis.com\/product.html?cat=8768E\" target=\"_blank\"\u003e8768E:\u003cspan\u003e \u003c\/span\u003e\u003c\/a\u003e\u003c\/strong\u003e:10mm Square HF Compatible Chip Holder, Holds 5 Die\u003cbr\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003eCPD MULTI-APPLICATIONS\u003c\/h3\u003e\n\u003cul class=\"arrow_list\"\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=1\"\u003eBio-Engineering\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=2\"\u003eBotanical\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=3\"\u003eEntomology\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=8\"\u003eGel\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=4\"\u003eGraphene\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=5\"\u003eMEMS\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=6\"\u003eMetal-Organic Frameworks\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=7\"\u003eMiscellaneous SEM CPD Apps\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca class=\"dsc_Lnks\" href=\"https:\/\/tousimis.com\/applications\/whitePapers\/applications-2018.html?App_Cat_ID=9\"\u003eNanoscribe\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Tousimis","offers":[{"title":"Automegasamdri®-936, for Process up to Five 6\" (150mm) Wafers per Process Run. PLEASE ASK FOR THE OFFER (Unit: each)","offer_id":57433871417670,"sku":"Automegasamdri®-936","price":0.0,"currency_code":"RON","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0909\/0452\/7174\/files\/8788B-01.jpg?v=1790150456","url":"https:\/\/allemee.com\/products\/automegasamdri%c2%ae-936","provider":"AllEm","version":"1.0","type":"link"}